文献类型：期刊文献

英文题名：Self-excited piezoelectric microcantilever for gas detection

作者：Zhou, Jia[1,3]; Li, Po[1]; Zhang, Song[2]; Huang, Yiping[1]; Yang, Pengyuan[2]; Bao, Minhang[1]; Ruan, Gang[1]

机构：[1]Fudan Univ, Dept Microelect, Shanghai 200433, Peoples R China;[2]Fudan Univ, Dept Chem, Shanghai 200433, Peoples R China;[3]E China Univ Sci & Technol, Dept Mech Engn, Shanghai 201512, Peoples R China

年份：2003

卷号：69

期号：1

起止页码：37

外文期刊名：MICROELECTRONIC ENGINEERING

收录：;EI(收录号：2003317579171);WOS:【SCI-EXPANDED(收录号:WOS:000184675700005)】；

语种：英文

外文关键词：self-excitation; microcantilever; gas sensor

摘要：Design, fabrication and results from theoretical and experimental studies on the self-excited piezoelectric microcantilever are presented in this paper. Theoretical studies have been carried out to design the microcantilever and have been extended to harmonic analysis using the finite element technique. Silicon microfabrication has been successfully completed to create microcantilever devices. Experimental studies have been performed to obtain the resonance frequencies. Applied as a mass-sensitive sensor, the microcantilever has a sensitivity of - 0.0024%/ppm and a minimum mass loading of 3.5 x 10(-9) g with the help of a zeolite sensitive layer to freon. (C) 2003 Elsevier B.V. All rights reserved.