文献类型：专利

英文题名：Microwave micro-plasma electron source, has source main body whose upper layer is provided with glass, plasma chamber fixed with electronic accelerate lens and electronic focus lens, and energy filter fixed with detector

作者：TU S;TANG J;YU W;YU X;MING X

机构：[1]UNIV EAST CHINA SCI & TECHNOLOGY

申请号：CN104752147-A

申请日：2015-03-26

公开日：2015-07-01

语种：英文

收录：DERWENT

摘要：NOVELTY - The source has a source main body provided with a plasma chamber (5), an electronic accelerate lens (12), an electronic focusing lens (11), an energy filter (9) and a detector (8). The source main body is a silicon-glass double-layer structure. A lower layer of the source main body is provided with a silicon substrate. An upper layer of the source main body is provided with a glass. The plasma chamber is fixed with the electronic accelerate lens and the electronic focus lens. The energy filter is fixed with the detector. The plasma chamber is a cylinder cavity body. USE - Microwave micro-plasma electron source. ADVANTAGE - The source has better energy-saving effect. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a microwave micro-plasma electron source. Plasma chamber (5) Detector (8) Energy filter (9) Electronic focusing lens (11) Electronic accelerate lens (12)