文献类型：专利

英文题名：Open network-based crystal growth intelligent robot system has vacuum system control module that is connected with process flow management module through field bus network, and crystal growing furnace whose vacuum degree is controlled

作者：LI Y;WANG K;MAO Y

机构：[1]UNIV EAST CHINA SCI & TECHNOLOGY

申请号：CN106544733-A

申请日：2016-10-18

公开日：2017-03-29

语种：英文

收录：DERWENT

摘要：NOVELTY - The robot system has a crystal weight sensing module (8) that is connected with a process flow management module (4) through a field bus network. A cooling system detection module (9) is connected with process flow management module. The current process parameters are provided to control the cooling water state during the crystal growth process. A vacuum system control module (10) is connected with process flow management module through field bus network. The vacuum degree of a crystal growing furnace is controlled according to the current process parameter. USE - Open network-based crystal growth intelligent robot system. ADVANTAGE - The robot system which ensures high efficiency and strong function is obtained effectively. The calculation and analysis of thermal field change adaptation ability for robot system are performed with high reliability. DESCRIPTION OF DRAWING(S) - The drawing shows a block diagram of the open network-based crystal growth intelligent robot system. (Drawing includes non-English language text) Process flow management module (4) Lifting movement control module (7) Crystal weight sensing module (8) Cooling system detection module (9) Vacuum system control module (10)