文献类型：期刊文献

英文题名：Research on Nonlinear Vibration of Cantilever by a Nanosecond Laser Excitation

作者：Sun, Tao[1]; Li, Jin[1]; Meng, Zhaonan[2]; Meng, Ziwei[1]; Liao, Xingyu[1]

机构：[1] School of Mechanical and Power Engineering, East China University of Science and Technology, Shanghai, 200237, China; [2] China Ship Development and Design Center, Shanghai, 201108, China

年份：2022

卷号：12343

外文期刊名：Proceedings of SPIE - The International Society for Optical Engineering

收录：EI(收录号：20224613118947)

语种：英文

外文关键词：Energy conversion - Energy efficiency - Energy transfer - Laser excitation - MEMS - Modulation - Nanocantilevers - Natural frequencies - Nonlinear optics - Pulsed lasers - Thermoelasticity

摘要：Laser thermoelastic actuation is widely used in micro-actuation fields, such as MEMS and MOEMS. The advantage lies in non-contact, non-destructive, easy integration, and mobility. The low energy efficiency of the thermoelastic laser actuation limits its applications in manipulations of millimeters and submillimeters. In this study, we investigate the laser thermoelastic mechanism, and it is demonstrated to be an efficient non-contact way to achieve optical actuation. A millimeter-level nickel cantilever is successfully actuated with large amplitudes (several millimeters) at lower orders resonant frequencies by a nanosecond pulsed laser. The nonlinear modal interacted vibrations of the cantilever are also observed experimentally, the energy transfers from a high-frequency pulsed laser excitation to the low-frequency response of the cantilever. Moreover, we demonstrate that the first-order mode of the cantilever always dominates the nonlinear vibration at far high-frequency excitation, which would benefit the laser actuation control of the cantilever at a higher frequency. Furthermore, this work also presents a laser modulation method for a new widely spaced modal interaction. The results show that the appearance of the low-frequency mode has a slow modulation of the amplitude of the high-frequency mode. This study provides an effective non-contact approach for the optical excitation of the millimeter-level cantilever, empirically investigates the nonlinear features, and enriches applications in fields such as AFM sensing, precise processing and separation of bio-particles/cells, optical manipulation and operation of microrobots, and lab-on-a-chip devices. ? 2022 SPIE.