文献类型：期刊文献

英文题名：Influence of residual stress on diffusion-induced bending in bilayered microcantilever sensors

作者：Xuan, Fu-Zhen[1];Shao, Shan-Shan[1];Wang, Zhengdong[1];Tu, Shan-Tung[1]

机构：[1]E China Univ Sci & Technol, Sch Mech Engn, Key Lab Safety Sci Pressurized Syst, MOE, Shanghai 200237, Peoples R China

年份：2010

卷号：518

期号：15

起止页码：4345

外文期刊名：THIN SOLID FILMS

收录：;EI(收录号：20102312995205);WOS:【SCI-EXPANDED(收录号:WOS:000278242000048)】；

基金：The authors are grateful for the supports provided by National Natural Science Foundations of China (10672058), Program for New Century Excellent Talents in University (NCET-06-0414) and Shanghai Leading academic discipline project (B503).

语种：英文

外文关键词：Diffusion; Residual stress; Microcantilever; Sensors; Finite difference methods

摘要：The influence of residual stress on diffusion-induced bending in bilayered microcantilever sensors has been analyzed under the framework of thermodynamic theory and Fick's second law. A self-consistent diffusion equation involving the coupling effects of residual stress and diffusion-induced stress is developed. Effects of thickness ratio, modulus ratio, diffusivity ratio and residual stress gradient of film and substrate on the curvature of bilayered cantilever are then discussed with the help of finite difference method. Results reveal that the curvature of bilayered cantilever increases with decreasing the diffusivity ratio and modulus ratio of substrate to film at a given time. Case study of the polysilicon/palladium hydrogen sensor has been finally carried out using the above developed bending theory. (C) 2010 Elsevier B.V. All rights reserved.