文献类型：期刊文献

英文题名：Creating Single-Crystalline β-CaSiO3 for High-Performance Dielectric Packaging Substrate

作者：Jia, Qingchao[1];Wang, Wenzhi[1];Zhang, Hujun[1];Chen, Chunyu[1];Li, Ao[1];Chen, Chen[2];Yu, Hang[2];Zhang, Liangzhu[1];Tao, Haizheng[3];Zeng, Huidan[1];Luo, Xiongke[2];Yue, Yuanzheng[4]

机构：[1]East China Univ Sci & Technol, Sch Mat Sci & Engn, Shanghai 200237, Peoples R China;[2]Shanghai Zenfocus Semicond Technol Co Ltd, Shanghai 201206, Peoples R China;[3]Wuhan Univ Technol, State Key Lab Silicate Mat Architectures, Wuhan 430070, Peoples R China;[4]Aalborg Univ, Dept Chem & Biosci, DK-9220 Aalborg, Denmark

年份：2025

卷号：37

期号：7

外文期刊名：ADVANCED MATERIALS

收录：;WOS:【SCI-EXPANDED(收录号:WOS:001382822300001)】；

基金：The authors are very grateful for the Innovative Research Group Project of the National Natural Science Foundation of China (nos. 52272001 and 52072122).

语种：英文

外文关键词：glass ceramics; high flexural strength; low dielectric; LTCC substrates; single crystals

摘要：beta-CaSiO3 based glass-ceramics are among the most reliable materials for electronic packaging. However, developing a CaSiO3 glass-ceramic substrate with both high strength (>230 MPa) and low dielectric constant (<5) remains challenging due to its polycrystalline nature. The present work has succeeded in synthesizing single-crystalline beta-CaSiO3 for a high-performance glass-ceramic substrate. This is accomplished by introducing Al3+ into the CaO-B2O3-SiO2 glass system, and by optimizing the sintering condition. Al3+ doping facilitates a heterogeneous network structure that energetically favors the precipitation of polycrystalline particles, including nanosized beta-CaSiO3 crystals and sub-nanosized alpha-CaSiO3 crystals. As the sintering temperature increases, the nano alpha-CaSiO3 crystals (2-10 nm) are gradually absorbed by the beta-CaSiO3 crystals. Through atomic rearrangement, alpha-CaSiO3 crystals transform into micrometer-sized single crystal beta-CaSiO3 (1-2 m) with layered structure. The low temperature co-fired beta-CaSiO3 glass-ceramics exhibit exceptional properties, including a low dielectric constant of 4.04, a low dielectric loss of 3.15 x 10(-3) at 15 GHz, and a high flexural strength of 256 MPa. This work provides a new strategy for fabricating high-performance single-crystalline glass-ceramics for electronic packaging and other applications.