文献类型：期刊文献

英文题名：Development of solid-based modeling system for surface micromachined MEMS

作者：Li, Jianhua[1]; Liu, Yusheng[2]; Ling, Hao[1]; Guo, Weibin[1]; He, Gaoqi[1]

机构：[1] Dept. of Computer Sci. and Eng., East China University of Science and Technology, Shanghai, 200237, China; [2] State Key Lab. of CAD and CG, Zhejiang University, Hangzhou Zhejiang, China

年份：2011

卷号：2

起止页码：297

外文期刊名：ICCRD2011 - 2011 3rd International Conference on Computer Research and Development

收录：EI(收录号：20112214015897)

语种：英文

外文关键词：Surface micromachining

摘要：Although a lot of CAD systems and tools have developed for MEMS, there does not appear to be a means for solid-based modeling. In this paper, a modeling system based on three-dimensional solid model for surface micromachined devices is developed. The system consists of three main modules: fast process simulation and material-based process simulation; automatic mask synthesis based on solid model; collaborative modeling to support design refinement. Based on a solid modeling core ACIS, the system is implemented in VC++ and some test results are given. The system helps MEMS designers work in a more intuitive mode. ? 2011 IEEE.