详细信息

激光诱导醋酸铜乙醇溶液反应直写金属铜线    

Direct Writing Copper Line from Copric Acetate in Alcohol Solution Reaction Induced by CO_2 Laser

文献类型:期刊文献

中文题名:激光诱导醋酸铜乙醇溶液反应直写金属铜线

英文题名:Direct Writing Copper Line from Copric Acetate in Alcohol Solution Reaction Induced by CO_2 Laser

作者:谢湘华[1];张谊华[1];方尔梯[1];膝玉美[1];曾宪康[1];杨永刚[1];黄宣劭[1]

机构:[1]华东理工大学化学物理研究室,上海市激光技术研究所

年份:1996

卷号:16

期号:6

起止页码:252

中文期刊名:应用激光

外文期刊名:Applied Laser

收录:CSTPCD;;北大核心:【北大核心1992】;CSCD:【CSCD2011_2012】;

语种:中文

中文关键词:醋酸铜溶液;激光直写;金属铜线;二氧化碳激光

外文关键词:CO_2 laser, copric acetate solution, laser direct writing, copper line

摘要:用CO2激光辐照诱导醋酸铜乙醇溶液反应,在石英衬底上激光直写得到金属铜线,研究了不同的写线速度对激光直写的效果,得到一个最佳的写线速度,该写线速度随激光强度的增大而提高。
Copper lines are directly written on a quartz substract from copric acetate in alcohol solution reaction induced by a CO2 laser. The effect of the laser direct writing speed on thequality of copper line is studied. The result shows that when the other conditions are in suitablevalues there is a optimum writing speed. The value increases with the laser power.

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