详细信息
激光诱导醋酸铜乙醇溶液反应直写金属铜线
Direct Writing Copper Line from Copric Acetate in Alcohol Solution Reaction Induced by CO_2 Laser
文献类型:期刊文献
中文题名:激光诱导醋酸铜乙醇溶液反应直写金属铜线
英文题名:Direct Writing Copper Line from Copric Acetate in Alcohol Solution Reaction Induced by CO_2 Laser
作者:谢湘华[1];张谊华[1];方尔梯[1];膝玉美[1];曾宪康[1];杨永刚[1];黄宣劭[1]
机构:[1]华东理工大学化学物理研究室,上海市激光技术研究所
年份:1996
卷号:16
期号:6
起止页码:252
中文期刊名:应用激光
外文期刊名:Applied Laser
收录:CSTPCD;;北大核心:【北大核心1992】;CSCD:【CSCD2011_2012】;
语种:中文
中文关键词:醋酸铜溶液;激光直写;金属铜线;二氧化碳激光
外文关键词:CO_2 laser, copric acetate solution, laser direct writing, copper line
摘要:用CO2激光辐照诱导醋酸铜乙醇溶液反应,在石英衬底上激光直写得到金属铜线,研究了不同的写线速度对激光直写的效果,得到一个最佳的写线速度,该写线速度随激光强度的增大而提高。
Copper lines are directly written on a quartz substract from copric acetate in alcohol solution reaction induced by a CO2 laser. The effect of the laser direct writing speed on thequality of copper line is studied. The result shows that when the other conditions are in suitablevalues there is a optimum writing speed. The value increases with the laser power.
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