文献类型：期刊文献

中文题名：一种非接触式光学微腔液压测量系统

英文题名：A non-contact optical microcavity liquid pressure measurement system

作者：魏鹤鸣[1];侯林嵩[1];丁武成[1];殷瑞雪[2];任冬妮[3]

机构：[1]上海大学特种光纤与光接入网重点实验室,上海200444;[2]华东理工大学机械与动力工程学院,上海200000;[3]明澈生物科技(苏州)有限公司,苏州215100

年份：2024

卷号：47

期号：7

起止页码：42

中文期刊名：电子测量技术

外文期刊名：Electronic Measurement Technology

收录：CSTPCD;;北大核心:【北大核心2023】；

语种：中文

中文关键词：微腔压力传感;双光子三维打印技术;非接触式光学传感;液体压强测量系统

外文关键词：microcavity pressure sensing;two-photon 3D printing technology;non-contact optical sensing;liquid pressure measurement system

摘要：为满足在狭小腔室中测量液体压强的需求,设计了一种非接触式光学法布里珀罗微腔液压测量系统,其中,光学微腔采用双光子三维打印技术制备,膜结构尺寸仅为350μm,设计的膜厚分别为4μm和6μm。系统主要采用嵌入式设计与衍射光栅光谱模块互联,实时采集光学微腔干涉光谱信号,实现了高精度光谱动态解调。实验结果表明,室温(25℃)下,4μm膜厚的微腔液压灵敏度高达398 pm/kPa,系统分辨率可达35.5 Pa,重复性较好,有望用于生物医学眼压等应用场景。
In order to meet the demand of measuring liquid pressure in narrow chamber,this paper designs a non-contact Fabry-Perot microcavity based optical liquid pressure measuring system.The optical microcavity is fabricated by two-photon 3D printing technology,with a compact size of 350μm.The diaphragms with a thickness of 4μm and 6μm were designed.The system is based on combination of the embedded design and diffraction grating spectral module,which can acquire the optical interference signal,realizing high-resolution spectrum dynamic demodulation.The experiments show that the sensing sensitivity of the 4μm-thickness device can reach 398 pm/kPa at room temperature(25℃),and the system shows a high resolution of 35.5 Pa and good repeatability,which has potential in biomedical intraocular pressure sensing applications.