文献类型：期刊文献

英文题名：Revealing the microscopic CVD growth mechanism of MoSe2 and the role of hydrogen gas during the growth procedure

作者：Wang, Hulian[1,2,3];Zhu, Dancheng[3];Jiang, Feng[3];Zhao, Pei[4,5];Wang, Hongtao[4,5];Zhang, Ze[3];Chen, Xin[1,2];Jin, Chuanhong[3]

机构：[1]East China Univ Sci & Technol, Sch Mat Sci & Engn, Minist Educ, Key Lab Ultrafine Mat, Shanghai 200237, Peoples R China;[2]East China Univ Sci & Technol, Sch Mat Sci & Engn, Shanghai Key Lab Adv Polymer Mat, Shanghai 200237, Peoples R China;[3]Zhejiang Univ, Sch Mat Sci & Engn, State Key Lab Silicon Mat, Hangzhou 310027, Zhejiang, Peoples R China;[4]Zhejiang Univ, Inst Appl Mech, Hangzhou 310027, Zhejiang, Peoples R China;[5]Zhejiang Univ, Key Lab Soft Machines & Smart Mat Zhejiang Prov, Hangzhou 310027, Zhejiang, Peoples R China

年份：2018

卷号：29

期号：31

外文期刊名：NANOTECHNOLOGY

收录：;EI(收录号：20182405310943);WOS:【SCI-EXPANDED(收录号:WOS:000433180700001)】；

基金：The ZJU team was financially supported by the National Science Foundation of China under Grant Nos. 51772265, 51472215, 51761165024 and 61721005, the National Basic Research Program of China under Grant No. 2014CB932500 and the 111 project under Grant No. B16042. The authors in Shanghai were supported by the Shanghai Leading Academic Discipline Project (B502), the Shanghai Key Laboratory Project (08DZ2230500). The authors thank the Center of Electron Microscopy of Zhejiang University for the access to microscope facilities.

语种：英文

外文关键词：CVD; growth mechanism; MoSe2; TEM

摘要：Understanding the microscopic mechanisms for the nucleation and growth of two-dimensional molybdenum diselenide (2D MoSe2) via chemical vapor deposition (CVD) is crucial towards the precisely controlled growth of the 2D material. In this work, we employed a joint use of transmission electron microscopy and CVD, in which the 2D MoSe2 were directly grown on a graphene membrane based on grids, that enables the microstructural characterization of as-grown MoSe2 flakes. We further explore the role of hydrogen gas and find: in an argon ambient, the primary products are few-layer MoSe2 flakes, along with MoOx nanoparticles; while with the introduction of H-2, single-layer MoSe2 became the dominant product during the CVD growth. Quantitative analysis of the effects of H-2 flow rate on the flake sizes, and areal coverage was also given. Nevertheless, we further illuminated the evolution of shape morphology and edge structures of single-layer MoSe2, and proposed the associated growth routes during a typical CVD process.