文献类型：期刊文献

英文题名：A wearable pressure sensor based on ultraviolet/ozone microstructured carbon nanotube/polydimethylsiloxane arrays for electronic skins

作者：Yu, Guohui[1];Hu, Jingdong[1];Tan, Jianping[1];Gao, Yang[1];Lu, Yongfeng[2];Xuan, Fuzhen[1]

机构：[1]East China Univ Sci & Technol, Sch Mech & Power Engn, Shanghai 200237, Peoples R China;[2]Univ Nebraska, Dept Elect & Comp Engn, Lincoln, NE 68588 USA

年份：2018

卷号：29

期号：11

外文期刊名：NANOTECHNOLOGY

收录：;EI(收录号：20180704803537);WOS:【SCI-EXPANDED(收录号:WOS:000424240000001)】；

基金：This work is supported by the National Natural Science Foundation of China (Grant No. 51705154, 11502082, and 51605164) and Fundamental Research Funds for the Central Universities (Project No. 222201714014 and 222201714017). It is also sponsored by Shanghai Sailing Program 17YF1403300.

语种：英文

外文关键词：wearable pressure sensor; electronic skin; human motion detection; human health monitoring

摘要：Pressure sensors with high performance (e. g., a broad pressure sensing range, high sensitivities, rapid response/relaxation speeds, temperature-stable sensing), as well as a cost-effective and highly efficient fabrication method are highly desired for electronic skins. In this research, a high-performance pressure sensor based on microstructured carbon nanotube/polydimethylsiloxane arrays was fabricated using an ultra-violet/ozone (UV/O-3) microengineering technique. The UV/O-3 microengineering technique is controllable, costeffective, and highly efficient since it is conducted at room temperature in an ambient environment. The pressure sensor offers a broad pressure sensing range (7 Pa-50 kPa), a sensitivity of similar to -0.101 +/- 0.005 kPa(-1) (< 1 kPa), a fast response/relaxation speed of similar to 10 ms, a small dependence on temperature variation, and a good cycling stability (> 5000 cycles), which is attributed to the UV/O-3 engineered microstructures that amplify and transfer external applied forces and rapidly store/release the energy during the PDMS deformation. The sensors developed show the capability to detect external forces and monitor human health conditions, promising for the potential applications in electronic skin.