文献类型：期刊文献

英文题名：Flexible microstructured pressure sensors: design, fabrication and applications

作者：Gao, Yang[1];Xiao, Ting[1];Li, Qi[1];Chen, Yang[1];Qiu, Xunlin[1];Liu, Jiawen[1];Bian, Yuqing[1];Xuan, Fuzhen[1]

机构：[1]East China Univ Sci & Technol, Sch Mech & Power Engn, Key Lab Pressure Syst & Safety MOE, Shanghai 200237, Peoples R China

年份：2022

卷号：33

期号：32

外文期刊名：NANOTECHNOLOGY

收录：;EI(收录号：20222212182375);WOS:【SCI-EXPANDED(收录号:WOS:000798066400001)】；

基金：This project was supported by the National Natural Science Foundation of China (Grant Nos. 51835003, 61804054 and 12174102), financial support from the National Key R&D Program of China (No. 2021YFC3001802), and the Open Project Program of Wuhan National Laboratory for Optoelectronics NO.2020WNLOKF007. Additionally, the Shanghai Program for Professor of Special Appointment (Eastern Scholar) at Shanghai Institutions of Higher Learning is gratefully acknowledged.

语种：英文

外文关键词：flexible pressure sensor; fabrication method; anti-interference; health monitoring; robotics and prosthesis; human-machine interface

摘要：In recent years, flexible pressure sensors have caused widespread concern for their extensive applications in human activity and health monitoring, robotics and prosthesis, as well as human-machine interface. Flexible pressure sensors in these applications are required to have a high sensitivity, large detective limit, linear response, fast response time, and mechanical stability. The mechanisms of capacitive, piezoresistive, and piezoelectric pressure sensors and the strategies to improve their performance are introduced. Sensing layers with microstructures have shown capability to significantly improve the performances of pressure sensors. Various fabrication methods for these structures are reviewed in terms of their pros and cons. Besides, the interference caused by environmental stimuli and internal stress from different directions leads to the infidelity of the signal transmission. Therefore, the anti-interference ability of flexible pressure sensors is highly desired. Several potential applications for flexible pressure sensors are also briefly discussed. Last, we conclude the future challenges for facilely fabricating flexible pressure sensors with high performance and anti-interference ability.