文献类型：期刊文献

英文题名：A nonlinear model for the layer between plates in acoustic noncontact transportation

作者：Li, Jin[1];Cao, Wenwu[2];Zhang, Wenjun[1,3]

机构：[1]E China Univ Sci & Technol, Sch Mech & Power Engn, Shanghai 200237, Peoples R China;[2]Penn State Univ, Mat Res Inst, University Pk, PA 16802 USA;[3]Univ Saskatchewan, Dept Mech Engn, Saskatoon, SK S7N 5A9, Canada

年份：2014

卷号：116

期号：21

外文期刊名：JOURNAL OF APPLIED PHYSICS

收录：;EI(收录号：20145000312950);WOS:【SCI-EXPANDED(收录号:WOS:000346007400062)】；

基金：This research was supported in part by the National Natural Science Foundation of China under Grant No. 51305138, the Science and Technology Commission of Shanghai Municipality under Grant No. 13ZR1453300, and Opening Fund of State Key Lab of Digital Manufacturing Equipment and Technology under Grant No. DMETKF2014013.

语种：英文

外文关键词：Glass substrates

摘要：To more accurately describe the noncontact transport behavior of traveling acoustic waves, a nonlinear model is presented in this paper for the squeeze gas film with consideration of gas inertia in the case of a large amplitude motion and low viscosity of the gas. A closed form solution is derived for the vertical and horizontal forces of the film from this model. Our results have shown that the gas inertia has a significant influence on the pressure distribution in the squeeze film, and the inertial force is higher than the viscous force. The predicted levitation and horizontal driving forces are found to be in good agreement with our experimental measurements. Our inertia model provides a powerful tool for the force estimation and its potential benefits could be far reaching. The accurate prediction of these forces is useful to design the system for levitating and transporting planar objects, such as MEMS devices, glass substrates, and IC chips (C) 2014 AIP Publishing LLC.