文献类型：期刊文献

中文题名：AlN 粉末制备的热力学分析和实验研究

英文题名：Thermodynamic Analysis and Experimental Study of AIN Powder Preparation

作者：李春忠[1];胡黎明[1];陈敏恒[1]

机构：[1]华东化工学院技术化学物理研究室

年份：1992

卷号：7

期号：4

起止页码：397

中文期刊名：无机材料学报

外文期刊名：Journal of Inorganic Materials

收录：CSTPCD;;Scopus;北大核心:【北大核心1992】；CSCD:【CSCD2011_2012】；

语种：中文

中文关键词：化学气相淀积;超细粉末;氮化铝

外文关键词：Chemical vapor deposition;;Ultrafine particles;;Thermodynamics

摘要：对制备 AlN 的体系 AlCl_3-NH_3-N_2进行了热力学分析,确立了 AlN 粉末合成所需要的热力学条件.在700～1000℃下,利用无水 AlCl_3和 NH_3的化学气相淀积反应合成得到了高纯 AlN 超细粒子粉末,研究了反应温度、AlCl_3浓度和总流量等对 AlN 粉末理化性质的影响.实验确立了产物低温和高温热处理条件.
The system of AlCl_3-NH_3-N_2,which was used to synthesize AIN ultrafine particles,wasanalyzed thermodynamically,and the condition of AIN powder preparation was evaluated.Highpurity AIN ultrafine particles were synthesized by chemical vapor deposition of anhydrous AlCl_ 3and NH_3 at 700～1000 ℃.The effects of temperature,AlCl_3 concentration,and total flowrate on the properties of AIN powder were studied.The conditions of heat-treatment at lowand high temperatures for the products were determined by experiment.