文献类型：期刊文献

英文题名：Two-dimensional manipulation system based on laser-induced near-field acoustic levitation

作者：Li, Jin[1];Yang, Dingkun[1];Ding, Jijie[1];Li, Jiasheng[2]

机构：[1]East China Univ Sci & Technol, Sch Mech & Power Engn, Shanghai, Peoples R China;[2]China Acad Engn Phys, Inst Mech Mfg Technol, Mianyang, Peoples R China

年份：2025

卷号：64

期号：12

外文期刊名：OPTICAL ENGINEERING

收录：;EI(收录号：20260720051754);WOS:【SCI-EXPANDED(收录号:WOS:001680926800023)】；

基金：This work was supported by the National Natural Science Foundation of China (Grant Nos. 52075172 and 52575060) and the National Key Research and Development Program of China (Grant No. J0149(2)-2325-KYF).

语种：英文

外文关键词：noncontact manipulation; 2-D manipulation; photoacoustic effect; near field acoustic levitation

摘要：Laser technology has been widely applied in numerous fields such as semiconductor manufacturing and advanced manufacturing due to its advantages of flexibility, ease of miniaturization, and simplicity of equipment. However, current laser-based manipulation techniques face limitations in macroscale object control due to their restricted driving force and the absence of reliable mathematical models describing nonlinear characteristics arising from multiphysics. Herein, we present a hybrid approach integrating photoacoustic methods with near-field acoustic levitation for object manipulation. This methodology not only preserves the inherent advantages of laser operation (flexibility and equipment simplicity) but also significantly enhances driving forces, enabling laser-driven actuation of milligram-scale objects, with a maximum mass of 8.125 mg. Furthermore, through systematic investigation of laser-induced near-field acoustic levitation (LINFAL), we have developed a mathematical model to better characterize the nonlinear dynamics of laser-to-force conversion. Based on this model, we propose a control method based on the distance between the laser excitation point and the object. This method achieves accurate control under high nonlinearity of multiple physics. Therefore, we have developed a two-dimensional LINFAL control system. The system has achieved control over the position and posture of objects, breaking through the limitation that laser operation affects the statistical distribution of particles, rather than controlling individual objects. This system has achieved precise linear movement control of objects with a relative error of less than 1% and rotation control with an angular error of less than 1 deg. These results demonstrate the potential for laser-induced excitation to be widely used in nondestructive testing, precision operations, and driving micro-resonators.