文献类型：期刊文献

英文题名：Nano-notch modulated fracture behaviors in nanoscale thin films

作者：Yan, Yabin[1,2,3];Xu, Guoqing[1,2];Xuan, Fuzhen[1,2,3]

机构：[1]East China Univ Sci & Technol, Shanghai Key Lab Intelligent Sensing & Detect Tech, Shanghai 200237, Peoples R China;[2]East China Univ Sci & Technol, Sch Mech & Power Engn, Key Lab Pressure Syst & Safety, Minist Educ, Shanghai 200237, Peoples R China;[3]Shanghai Collaborat Innovat Ctr High end Equipment, Shanghai 200237, Peoples R China

年份：2023

卷号：281

外文期刊名：INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES

收录：;EI(收录号：20233214511617);WOS:【SCI-EXPANDED(收录号:WOS:001053711900001)】；

基金：Y. Yan thanks the support of National Natural Science Foundation of China (Grant No. 52275149) , Program for Professor of Special Appointment (Eastern Scholar) at Shanghai Institutions of Higher Learning, the Fundamental Research Funds for the Central Universities (Grant No. JKG01221675) . F.Z. Xuan thanks the support of National Natural Science Foundation of China (Grant No. 51835003) .

语种：英文

外文关键词：Nanoscale; Interface delamination; Cohesive zone model; Fracture Criterion

摘要：This study presents an efficient methodology to assess fracture behavior in nanoscale multilayers. After fabricating a nano-cantilever specimen of Cu/Si/SiN, a notch with the tip radius of 3 similar to 15 nm was introduced into the SiN layer. By changing the position of notch tip, the delamination of Cu/SiN or Cu/Si interfaces, and the fracture of SiN layer were obtained by in situ TEM bending experiments, respectively. The fracture strength of interfaces and SiN layer was determined using an exponential cohesive zone model (CZM) and the crack propagation from the notch tip was analyzed by phase field simulation. Finally, a fracture phase diagram related to the typical position parameters of nano-notch is proposed to predicted the fracture behaviors including the delamination of different interfaces and the fracture of monolayer in nanoscale multilayers. This study provides significant insights into the fracture behavior occurred at nanoscale and a simple but efficient methodology to evaluate the fracture strength of any part in nanoscale multilayers.