文献类型：会议论文

英文题名：An investigation of polymer-carbon black composite gas detectors

作者：Sun, Xiaoxiang[1]; Xie, Haifen[1,2]; Yang, Qiudong[1]; Huang, Yiping[1]

机构：[1] Department of Microelectronics, System State Key Lab, Fudan University, Handan Road 220, Shanghai 200433; [2] Department of Physics, East China University of Science and Technology, Xuefu Road 1000, Jinshan District, Shanghai

会议论文集：Fifth International Conference on Thin Film Physics and Applications

会议日期：May 31, 2004 - June 2, 2004

会议地点：Shanghai, China

语种：英文

外文关键词：Carbon black - Gold - Microelectrodes - Microsensors - Polymers - Silicon - Thin films - VLSI circuits

摘要：In this paper, we describe the development of novel chemical gas sensors. These sensors consist of sensitive films and interdigited microelectrodes. The sensitive films are made of insulating polymers mixed with conducting carbon black. Interdigitated microelectrodes made of gold are fabricated on the silicon by VLSI technology and packaged. With the deposition of different polymer films on the interdigitated electrodes, we can make various polymer-carbon black composites chemresistive gas microsensors. When the sensitive films are exposed to organic gases, these films will absorb the gases and swell, that is, the resistance of the films goes to increase. We test two kinds of microsensors exposed in the same concentrations of organic gases. By principle component analysis of responses of microsensors, it is clear that two kinds of the same concentration different gases can be easily discriminated.