文献类型：专利

英文题名：Upper electrode regulating device, has automatic feeding module mounted with manual regulating module that is mounted with sample disk, and rotating component provided along Z-axis

作者：CHEN H;DONG X;GU H;WANG J

机构：[1]UNIV EAST CHINA TECHNOLOGY;[2]UNIV EAST CHINA SCI & TECHNOLOGY

申请号：CN104299883-A

申请日：2014-10-09

公开日：2015-01-21

语种：英文

收录：DERWENT

摘要：NOVELTY - The device has a mounting interface whose upper part is mounted with a Y-axis translation regulating module. The Y-axis translation regulating module is mounted with a Z-axis translation regulating module. An end of an X-axis translation regulating module is mounted with an ion source nozzle. An automatic feeding module is mounted with a manual regulating module. The manual regulating module is mounted with a sample disk. A rotating component is provided along Z-axis. USE - Upper electrode regulating device. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of an upper electrode regulating device.