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Templated bicontinuous Tin oxide thin film fabrication and the NO2 gas sensing  ( SCI-EXPANDED收录 EI收录)  

文献类型:期刊文献

英文题名:Templated bicontinuous Tin oxide thin film fabrication and the NO2 gas sensing

作者:Zhao, X.[1];Shi, W.[1];Mu, H.[2];Xie, H.[2];Liu, F.[1]

机构:[1]Shanghai Normal Univ, Dept Phys, Shanghai 200234, Peoples R China;[2]E China Univ Sci & Technol, Sch Sci, Dept Phys, Shanghai 200237, Peoples R China

年份:2016

卷号:659

起止页码:60

外文期刊名:JOURNAL OF ALLOYS AND COMPOUNDS

收录:;EI(收录号:20154801604050);WOS:【SCI-EXPANDED(收录号:WOS:000366944100009)】;

基金:The research was supported by the Natural Science Foundation of China (Grant Nos. 61376010 and U1531109).

语种:英文

外文关键词:NO2 gas sensor; Bicontinuous structure; Tin oxide; Sensing mechanism

摘要:Bicontinuous Tin oxide (SnO2) thin films were fabricated by atomic layer deposition (ALD), annealing, and acid washing with nanoporous gold (NPG) structure serving as templates. The resultant SnO2 films show high sensitivity on NO2 gas. The detection limit is as low as 170 ppb in dry N-2 flow with a rapid response/recovery time of 40/130 s at the optimized working temperature of 300 degrees C. The performances dependence of the gas sensor on the working temperatures and the exposure environments reveal that the gas responses strongly rely on the dynamic balance of O-2, O-2(-), O-, NO2-, and NO3-. Our study not only shows this bicontinuous SnO2 films is promising for sensitive gas sensor but also provides insightful understanding on the NO2 gas sensing mechanism. (C) 2015 Elsevier B.V. All rights reserved.

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