文献类型：期刊文献

英文题名：Laser micro-structured pressure sensor with modulated sensitivity for electronic skins

作者：Yang Gao[1];Cong Lu[1];Yu Guohui[1];Jin Sha[1];Tan, Jianping[1];Xuan, Fuzhen[1]

机构：[1]East China Univ Sci & Technol, Sch Mech & Power Engn, Shanghai 200237, Peoples R China

年份：2019

卷号：30

期号：32

外文期刊名：NANOTECHNOLOGY

收录：;EI(收录号：20193007229122);WOS:【SCI-EXPANDED(收录号:WOS:000467829500002)】；

基金：This project is supported by National Key Research and Development Program of China (No. 2018YFB1105400), National Natural Science Foundation of China (Grant No. 51705154 and 61804054), Shanghai Program for Professor of Special Appointment (Eastern Scholar) at Shanghai Institutions of Higher Learning, Shanghai Rising-Star Program (A type) (Grant No. 18QA1401300), Shanghai Sailing Program 17YF1403300, and the Fundamental Research Funds for the Central Universities (50321071918005).

语种：英文

外文关键词：laser micro-engineering; wearable pressure sensors; micro-structures; carbon nanotubes; health monitoring

摘要：Micro-structured pressure sensors with broad pressure sensing range, high sensitivity and rapid response speeds are highly desired for epidermal electronic skin. The widely used methods to fabricate micro-structured pressure sensors are lithography and biomaterial-replicating, which are either complex in preparation procedure or uncontrollable in micro-structure morphology. In this work, laser micro-structured wearable pressure sensors with high-performance are developed for epidermal electronic skin. Laser micro-engineering, with scalability, high-efficiency, and controllability, is employed to prepare a series of micro-structures on elastomers for modulating and enhancing the sensitivity of the sensors. The device with micro-domes owns a sensitivity of -1.82 kPa(-1), which is approximately 17 times better than the one based on long micro-ridges. Due to the reduced viscous properties of the elastomers by laser micro-engineering, the sensor based on micro-domes demonstrates rapid response/relaxation speeds of 0.036 and 0.052 s, respectively, and a detection limit of 0.001 kPa. Additionally, the device has a good durability (6,000 cycles) with a repeatability deviation of 1.44%, confirming its stability. Combined with near field communication technology, the sensor has been investigated as epidermal electronic skin for health monitoring.