文献类型：期刊文献

中文题名：超大规模集成电路用超净高纯过氧化氢的制备研究

英文题名：Study on the preparation of ultra-pure hydrogen peroxide for ultra-large scale integration(ULSI)

作者：许振良[1];魏永明[1];郎万中[1];杨晓天[1];沈丽萍[2];汤慧[2];吴家白[2];惠绍樑[2]

机构：[1]华东理工大学化学工程研究所,上海200237;[2]上海华谊微电子化学品有限公司,上海200940

年份：2005

卷号：27

期号：10

起止页码：633

中文期刊名：化学试剂

外文期刊名：Chemical Reagents

收录：CSTPCD;;北大核心:【北大核心2004】；CSCD:【CSCD2011_2012】；

基金：国家高技术研究发展计划(863计划)资助项目(2002AA3Z1310)。

语种：中文

中文关键词：超净高纯化学品;过氧化氢;吸附-离子交换-膜分离;集成分离

外文关键词：ultra-pure chemicals; hydrogen peroxide solution;adsorption-ion exchange-membrane separation; integrated purification

摘要：采用吸附-离子交换-膜分离集成纯化制备了超净高纯过氧化氢,讨论了过氧化氢中各种树脂的温度变化、不同膜对过氧化氢中颗粒脱除的影响和过氧化氢纯化效果。此外,分析了超净高纯化学品生产中存在的问题,为今后的高纯超净化学品提出了方向。
There was a great need of ultra-pure microelectronic chemicals in the manufacturing of ultra-large scale integration（ULSI）, in which microelectronic chemicals play an important role. Ultra-pure hydrogen peroxide was prepared using the integrated purification of adsorption-ion exchange-membrane separation. The temperature changes of various resins in hydrogen peroxide solution, the effects of different membranes on the particle removal of hydrogen peroxide solution and the experimental results of the purification of hydrogen peroxide solution were discussed. The present problems in the production of ultra-pure chemicals were analyzed.