文献类型：期刊文献

中文题名：Ni-Ti-O纳米管阵列的制备与氢敏性能

英文题名：Fabrication and Hydrogen Sensing Properties of Ni-Ti-O Nanotube Arrays

作者：黎朝晖[1];丁冬雁[1];宁聪琴[2];刘强[1];王学武[3]

机构：[1]上海交通大学材料科学与工程学院微电子材料与技术研究所,上海200240;[2]中国科学院上海硅酸盐研究所高性能陶瓷和超微结构国家重点实验室,上海200050;[3]华东理工大学信息科学与工程学院,上海200237

年份：2014

卷号：39

期号：10

起止页码：774

中文期刊名：半导体技术

外文期刊名：Semiconductor Technology

收录：CSTPCD;;北大核心:【北大核心2011】；CSCD:【CSCD_E2013_2014】；

基金：国家重大科学仪器设备开发专项资助项目(2012YQ15000105)

语种：中文

中文关键词：Ni-Ti-O;阳极氧化;纳米阵列;热稳定性;氢敏

外文关键词：Ni-Ti-O;anodization;nanotube array;thermal stability;hydrogen sensing

摘要：掺杂是改善氧化钛纳米结构半导体特性的有效方法。在醇基电解液中,采用阳极氧化方法在TiNi合金表面成功制备出Ni-Ti-O纳米管阵列。通过扫描电子显微镜(SEM)、X射线衍射仪(XRD)和X射线光电子能谱仪(XPS)等分析方法对纳米管阵列的表面形貌、微结构和热稳定性进行了表征,研究了退火后纳米管阵列的氢敏性能和抗干扰性。实验结果表明:在醇基电解质液中,采用阳极氧化方法在TiNi合金表面可制备出大面积均匀生长的Ni-Ti-O纳米管阵列,其管长约为220 nm,管径约为25 nm。经525℃热处理后其表面仍可保持规则的纳米阵列形貌。热处理后的Ni-Ti-O纳米管阵列在100℃对体积分数为0.1%的氢气具有良好的氢敏响应特性,对相同浓度的N2和NO则无明显响应。
Doping of titania nanostructures is an efficient way to modify semiconducting properties of the oxide. Ni-Ti-O nanotube arrays were successfully fabricated on the surface of TiNi alloy with the anodization in the alcohol-based electrolyte. The surface morphology,microstructure and thermal stability of the nanotube arrays were characterized by the scanning electron microscope,X-ray diffraction and Xray photoelectron spectroscopy. Hydrogen sensing and anti-interference performances of the nanotubes annealed were investigated. The experimental results indicate that large area Ni-Ti-O nanotube arrays with regular morphologies can be fabricated in the alcohol-based electrolytes. The nanotube length and diameter are about 220 nm and 25 nm, respectively. Regular nanotube array structure of the surface morphology can be maintained after 525 ℃ heat treatment. The Ni-Ti-O nanotube arrays after heat treatment demonstrate a good sensitivity for volume fraction of 0. 1% hydrogen at 100 ℃,and less sensitive to the NO and N2.