文献类型：期刊文献

英文题名：W-Band Broadband and High-Gain Metasurface-Inspired Stack-Up Patch Antenna for 3-D Heterogeneous Integration

作者：Zhang, Shang[1];Huang, Yin-Shan[1];Zhang, Zi-Qi[1];Zhang, Yue[2];Zhang, Cheng-Rui[1];Zhou, Liang[1];Xu, Qi-Hao[1]

机构：[1]Shanghai Jiao Tong Univ, State Key Lab Radio Frequency Heterogeneous Integr, Shanghai 200240, Peoples R China;[2]East China Univ Sci & Technol, Shanghai 200237, Peoples R China

年份：2026

卷号：74

期号：6

起止页码：5158

外文期刊名：IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION

收录：;EI(收录号：20261120275865);WOS:【SCI-EXPANDED(收录号:WOS:001788958200029)】；

基金：This work was supported in part by the National Natural Science Foundation of China under Grant 62325110 and Grant 62188102, in part by the National Key Research and Development Project under Grant 2023YFB4403802, and in part by China Postdoctoral Science Foundation under Grant 2025M780521.

语种：英文

外文关键词：Antennas; Bandwidth; Metasurfaces; Substrates; Fingers; Resonant frequency; Broadband antennas; Patch antennas; Impedance; Antenna arrays; 3-D heterogeneous integration; antenna-in-package (AiP); benzocyclobutene (BCB); broadband; characteristic mode analysis (CMA); high gain; metasurface; SUEX thick film

摘要：This article presents the design of a broadband, high-gain, metasurface-inspired stack-up patch antenna. Two interdigital capacitors (IDCs) are symmetrically incorporated to introduce strong capacitive effects, enhancing impedance matching and enabling size reduction in the driven patch layer. This layer is then stacked with metasurface patches to further broaden the impedance bandwidth and enhance the gain. Characteristic mode analysis (CMA) is employed to guide the design of the metasurface antenna and to explain the mode behaviors. The integration of SUEX dry film ensures precise patterning and mechanical robustness, whereas the benzocyclobutene (BCB) substrate contributes to reduced dielectric loss, resulting in a low-profile, high-gain, and wideband antenna based on an in-house silicon-based MEMS photosensitive composite film. Simulated and measured results show excellent agreement, with the measured peak gain reaching 9.3 dBi at 94 GHz and a 10-dB impedance bandwidth ranging from 78 to 102 GHz. This antenna can be further three dimensionally integrated with other active components, resulting in compact millimeter-wave heterogeneous integration systems.