文献类型：期刊文献

英文题名：Femtosecond laser micro-fabricated flexible sensor arrays for simultaneous mechanical and thermal stimuli detection

作者：Bai, Ruijie[1];Gao, Yang[1];Lu, Cong[1];Tan, Jianping[1];Xuan, Fuzhen[1]

机构：[1]East China Univ Sci & Technol, Sch Mech & Power Engn, Shanghai 200237, Peoples R China

年份：2021

卷号：169

外文期刊名：MEASUREMENT

收录：;EI(收录号：20203509096737);WOS:【SCI-EXPANDED(收录号:WOS:000601005600003)】；

基金：This project was supported by the National Key Research and Development Program of China (Grant No. 2018YFB1105400), the National Natural Science Foundation of China (Grant Nos. 51705154, 51835003 and 61804054), Joint Fund of Ministry of Education of China for Equipment Preresearch (Grant No. 6141A02022136), the Shanghai Program for Professor of Special Appointment (Eastern Scholar) at Shanghai Institutions of Higher Learning, and Shanghai Rising Star Program (A type) (Grant No. 18QA1401300).

语种：英文

外文关键词：Laser micro-fabrication; Flexible pressure sensor; Flexible temperature sensor; Stimuli detection

摘要：Flexible sensor matrix with functionalities for multiple stimuli detection has prospect applications in structural health monitoring, internet of things, soft robotics, etc. However, fabrication of the sensor matrix in a simple, highly efficient, and scalable manner is still a challenge. To address this, a femtosecond (fs) laser microfabrication method is developed to fabricate a sensor matrix integrated with temperature and pressure sensor arrays. Through the programmable control of laser irradiation manner including scanning velocity, laser power, and laser irradiation intervals, the temperature and pressure sensor arrays were fabricated by the fs laser. The temperature sensors have a temperature coefficient of resistance of -0.52%/degrees C, higher than commercial temperature sensor based on platinum. The pressure sensors deliver a sensitivity of -2.01 kPa(-1), a response speed of 0.030 s, a detection window from 0.001 to 80 kPa, and high mechanical stability. When the fs laser microfabricated pressure and temperature sensor arrays are integrated together, the sensor matrix could simultaneously detect external mechanical and thermal stimuli.