文献类型：期刊文献

中文题名：磁阻驱动柔顺精密定位平台设计与测试分析

英文题名：Design and test analysis of a compliant precision positioning stage driven by reluctance actuators

作者：王巍[1];尹小恰[2];赖磊捷[1];朱利民[3]

机构：[1]上海工程技术大学机械与汽车工程学院,上海201620;[2]华东理工大学机械与动力工程学院,上海200237;[3]上海交通大学机械与动力工程学院机械系统与振动全国重点实验室,上海200240

年份：2026

卷号：34

期号：4

起止页码：586

中文期刊名：光学精密工程

外文期刊名：Optics and Precision Engineering

收录：;EI(收录号：20260920166329);北大核心:【北大核心2023】；

基金：国家自然科学基金项目(No.52475063)。

语种：中文

中文关键词：磁阻驱动器;柔性机构;磁滞;精密定位平台;轨迹跟踪控制

外文关键词：reluctance actuator;compliant mechanism;hysteresis;precision positioning stage;trajectory tracking control

摘要：为实现中短行程微纳米精密定位平台对高力密度与高精度控制的综合要求,设计分析了一种基于磁阻驱动器的柔顺精密定位平台,并对其进行了非线性磁滞建模和轨迹跟踪控制。首先,通过分析磁阻驱动器的等效磁路与不同气隙下的驱动力特性,结合柔性机构的刚度模型,确定了平台设计参数和适合平台工作的气隙大小;其次,搭建了实验平台系统,构建了包含有理函数与Prandtl-Ishlinskii逆磁滞模型的前馈补偿策略,实现了磁阻驱动器的非线性补偿。最后,利用比例-积分控制与陷波滤波器构成反馈控制方法,开展轨迹跟踪控制实验。实验结果表明:所构建的逆磁滞模型补偿和控制方法能够显著提升平台控制精度,非线性补偿后两种三角波信号的跟踪均方根误差分别降低了69.2%和63.68%,验证了本文所设计磁阻驱动柔顺精密定位平台在微纳米定位中的可行性与有效性。
To meet the comprehensive requirements of high force density and high-precision control for a medium-stroke micro-nano precision positioning stage,a compliant precision positioning stage based on reluctance actuators was designed and analyzed,with nonlinear hysteresis modeling and trajectory tracking control implemented.First,by analyzing the equivalent magnetic circuit of the reluctance actuator and its drive force characteristics under different air gaps,combined with the stiffness model of the flexure mechanism,the stage design parameters and the suitable air gap size for stage operation were determined.Subsequently,an experimental system was set up,and a feedforward compensation strategy incorporating a rational function and a Prandtl-Ishlinskii hysteresis inverse model was constructed to achieve nonlinear com?pensation for the reluctance actuator.Finally,a feedback control method comprising proportional-integral control and a notch filter was utilized to conduct trajectory tracking control experiments.Experimental results demonstrate that the constructed hysteresis inverse model compensation and control method significantly enhances the stage's control accuracy.After nonlinear compensation,the root mean square errors for tracking two different triangular wave signals were reduced by 69.2%and 63.68%,respectively,validating the feasibility and effectiveness of the designed compliant precision positioning stage using reluctance actuation in micro-nano positioning applications.