文献类型：期刊文献

中文题名：氟镧镨掺杂对铈基抛光粉微结构、颗粒特征及抛光性能的影响

英文题名：Effects of Fluorine or Lanthanum or Pr-doping on Micro-Structure,Particle Characterization and Polishing Performance of Ceria-Based Polishing Powders

作者：伍立军[1];王筠松[1];郭耘[1];卢冠忠[1]

机构：[1]华东理工大学工业催化研究所,上海200237

年份：2016

卷号：34

期号：5

起止页码：606

中文期刊名：中国稀土学报

外文期刊名：Journal of the Chinese Society of Rare Earths

收录：CSTPCD;;Scopus;北大核心:【北大核心2014】；CSCD:【CSCD2015_2016】；

语种：中文

中文关键词：铈基抛光粉;掺杂;Zeta电位;抛蚀量

外文关键词：ceria-based polishing powder; doping; zeta potential; MRR

摘要：以Ce_2(CO_3)_3为前驱体,La_2(CO_3)3和Pr_2(CO_3)_3为掺杂试剂,NH_4F为氟化剂制备铈基抛光粉,研究了F/La/Pr掺杂对铈基抛光粉的物相结构、表面形貌、表面Zeta电位和抛蚀量的影响。XRD,Raman光谱和Zeta电位分析表明:F的引入可以显著地减小铈基抛光粉的晶粒尺寸、增大其晶格缺陷和颗粒表面Zeta电位,且同时掺La-Pr比单独掺La对增大其晶格缺陷和颗粒表面Zeta电位影响更大。SEM分析表明,F的引入有利于颗粒的球形化,掺入La或Pr有利于改善颗粒的聚集状态。抛光测试分析表明:抛蚀量的大小与相应铈基抛光粉的颗粒表面Zeta电位和晶格缺陷成正比。
Using Ce2（ CO3 ）3 as precursor, La2（ CO3 ）3 and Pr2 （CO3 ）3 as doping reagent, and NH4F as fluorinating reagent, ceria-based polishing powders were prepared. The influence of doping F/La/Pr on phase structure, surface morphology, surface zeta potential and material removal rate （MRR） was investigated. The XRD, Raman spectra and Zeta potential analyses revealed that fluorine doping decreased the grain size, increased the lattice defects and the surface zeta potential of ceria-based polishing powders, and the effect of doping La-Pr simultaneously on the lattice defects and Zeta potential was larger than that of the single doping La. SEM analyses showed that the incorporation of F was favorable to the spherical shape of the particles and the doping of La or Pr was beneficial to improve the aggregation state of the particles. The polishing tests showed that the MRR was proportional to the surface zeta potential and the lattice defects of ceria-based polishing powders.