文献类型：期刊文献

中文题名：离子束轰击对SnO_2超微粒子薄膜性质的影响

英文题名：Influence of Iron Beam Bombardment on the Properties of SnO_2 Ultrafine Particle Films

作者：陆慧[1];陆元成[1];潘孝仁[1]

机构：[1]华东理工大学基础教育学院,华东理工大学物理系

年份：1994

卷号：20

期号：5

起止页码：693

中文期刊名：华东理工大学学报（自然科学版）

外文期刊名：Journal of East China University of Science and Technology

收录：CSTPCD;;Scopus;CSCD:【CSCD2011_2012】；

语种：中文

中文关键词：离子束;氧化锡;超微粒子;薄膜

外文关键词：ion beam;tin oxide;morphology;sensitivity;ultrafine particle films

摘要：采用直流气体放电活化反应蒸发法，沉积成ＳｎＯ＿２超微粒子薄膜（ＵＰＦ）。以不同能量的离子束轰击薄膜表面，用扫描电子显微镜、俄歇电子能谱仪等，分析了离子束作用对ＳｎＯ＿２ＵＰＦ表面形貌和化学组成的影响。同时研究了离子束作用前后，ＳｎＯ＿２ＵＰＦ对乙醇的气敏性质的变化。
SnO_2 ultrafine particle films were deposited by d.c. gas discharge activating reaction evaporation. The ion beams with various energy were used to bombard the SnO_2 UPF.Influence of ion beam bombardment on the SnO_2 UPF surface morphology and chemical composition was analysed by SEM and AES. The gas sensing properties of SnO_2 UPF to C_2H_5OH gas before and after being bombarded were also studied.