文献类型：期刊文献

中文题名：石墨烯基SnO_x-Sn气体传感器灵敏度影响因素研究

英文题名：Study on influencing factors of graphene-based SnO_x-Sn sensors gas sensitivity

作者：袁雨桐[1];杨洋飞飞[1];赵艺远[1];黄文杰[1];谢海芬[1]

机构：[1]华东理工大学理学院物理系

年份：2019

卷号：38

期号：8

起止页码：5

中文期刊名：传感器与微系统

外文期刊名：Transducer and Microsystem Technologies

收录：CSTPCD;;CSCD:【CSCD_E2019_2020】；

基金：全国大学生创新实验资助项目(201710251073)

语种：中文

中文关键词：石墨烯基;氧化锡;热蒸发;甲醛;二氧化氮

外文关键词：graphene-based;tin oxide;thermal evaporation;formaldehyde;nitrogen dioxide

摘要：为提高本征石墨烯的气敏特性,将锡和氧化锡薄膜蒸镀在气相沉积法制备的石墨烯表面,制成石墨烯基SnOx-Sn气体传感器,通过原子力显微镜(AFM)、场发射扫描电镜(FESEM)对其表面结构进行表征。并测试了其在室温下对低体积分数甲醛和二氧化氮(NO2)气体的响应特性。研究并分析了膜蒸发速率、基底加热时间、氧气流量对传感器响应灵敏度的影响。
In order to improve gas sensing properties of pristine graphene,tin and tin oxide thin-film is deposited by thermal evaporation on the surface of graphene prepared by low pressure chemical vapor deposition(LPCVD),and graphene-based SnO_x-Sn gas sensors are fabricated.The surface structure of the samples is characterized by atomic force microscopy(AFM)and field emission scanning electron microscopy(FESEM).Meanwhile,test the response characteristic to formaldehyde gas and nitrogen dioxide gas of low volume fraction at room temperature.The effect of film evaporation rate,substrate heating time and oxygen flow on the gas sensitivity is studied and analyzed.