文献类型：期刊文献

中文题名：SnO_2超微粒子薄膜的气敏特性研究

英文题名：Studies on the Gas Sensing Properties of Tin OxideUltrafine Particle Films

作者：陆慧[1];朱以华[1];陆元成[1];杨毅[1];潘孝仁[1]

机构：[1]华东化工学院物理系

年份：1994

卷号：7

期号：1

起止页码：25

中文期刊名：传感技术学报

外文期刊名：Chinese Journal of Sensors and Actuators

收录：CSTPCD;;Scopus;CSCD:【CSCD2011_2012】；

基金：国家自然科学基金资助

语种：中文

中文关键词：氧化锡;薄膜;灵敏度;气敏特性

外文关键词：tin dioxideultrafine particle filmsstructuresensitivity

摘要：作者用自行设计的直流气体放电活化反应蒸发装置制备出平均粒径约为40nm的SnO_2超微粒子薄膜.研究了不同氧分压下所得SnO_2超微粒膜的形貌、结构和组成等特性,以及不同样品对各种易燃气体的气敏特性,得出了灵敏度随氧分压及灵敏度随工作温度的变化曲线.
The tin dioxide ultrafine particle films with the average particle size of 40 nmhave been deposited by DC gas discharge activating reaction evaporation technique. Themophology,structure and composition of the films preparated at various oxygen partialpressure was discussed. The gas sensing properties of these samples to various in-flammable gases were also studied. The curves of the sensitivity as a function of oxygengas pressure and the sensors operating temperature were obtainde,respectively.