文献类型：期刊文献

中文题名：CaO-B_2O_3-SiO_2微晶玻璃LTCC基板的烧结性能研究

英文题名：Research on Sintering Property of CaO-B_2O_3-SiO_2 System Glass Ceramics

作者：干林杰[1];张树人[1];周晓华[1];胡鉴耿[1];王中俭[2]

机构：[1]电子科技大学电子薄膜与集成器件国家重点实验室,成都610054;[2]华东理工大学无机材料系,上海200237

年份：2008

卷号：22

期号：3

起止页码：352

中文期刊名：材料导报（纳米与新材料专辑）

收录：Scopus

语种：中文

中文关键词：CaO-B2O3-SiO2系统微晶玻璃;低温共烧;晶相分析

外文关键词：CaO-B2O3-SiO2 glass-ceramics, low temperature cofiring, crystal phase analysis

摘要：CaO-B_2O_3-SiO_2微晶玻璃基板具有介电常数低、能与金属电极低温共烧等特性。设计了3种玻璃配方,重点研究了其烧结性能和晶相组成。通过差热分析、X射线衍射晶相分析、SEM形貌分析、烧结收缩实验以及介电性能测定等,研究了玻璃组成、粉体颗粒度和烧结制度等对材料晶相组成和性能的影响。结果表明,主晶相为硅灰石,粉体颗粒度D_(50)在2μm左右,经850℃、10min烧结,可以获得致密度高、介电常数和介电损耗低的LTCC材料。
CaO-B2O3-SiO2 glass-ceramic is characterized with both low temperature firing with metal electrode and excellent dielectric properties. In this paper, three kinds of glass compositions are designed, focusing on their sintering performance and compositions of their crystal phase. The sintering shrinkage, dielectric constant and loss, differential thermal analysis, SEM and XRD are performed to study the influence of glass compositions, the particle diameter of the powder as well as the sintering process on the material properties. The experiment results show that its main crystal phase is wollastonite, and the particle diameter Ds0 is around 2 μm. After sintered well at 850℃/10min, the LTCC material with high densification, low dielectric constant and loss can be obtained. The material represents excellent dielectric properties, which is desirable for LTCC application.