文献类型：期刊文献

中文题名：基底表面预氧化对SiO_2/S复合涂层的影响

英文题名：Effect of substrate pre-oxidation on SiO_2/S composite coating deposited on HP40 alloy

作者：周建新[1];徐宏[1];张莉[1];刘京雷[1];戚学贵[1]

机构：[1]华东理工大学机械与动力工程学院,上海200237

年份：2007

卷号：28

期号：5

起止页码：146

中文期刊名：材料热处理学报

外文期刊名：Transactions of Materials and Heat Treatment

收录：CSTPCD;;EI(收录号：20074610915379);Scopus;北大核心:【北大核心2004】；CSCD:【CSCD2011_2012】；

语种：中文

中文关键词：常压化学气相沉积;SiO2/S复合涂层;HP40合金;预氧化

外文关键词：atmospheric pressure chemical vapor deposition （APCVD）; silica/sulfur composite coating; HP40 alloy; pre-oxidation

摘要：为了减缓乙烯裂解炉管内表面的结焦，采用常压化学气相沉积方法，以二甲基二硫（DMDS）和正硅酸乙酯（TEOS）为先驱体。在预氧化的HP40合金试样上制备了SiO2／S复合涂层。分析了沉积温度、气体流速和沉积时间对涂层沉积速率的影响。利用扫描电镜、XPS和Raman光谱分别对涂层的形貌、成分和化学结构进行了表征，并对预氧化试样与涂层的结合进行了实验研究。结果表明，涂层主要由三节环Si2O-Si结构和Si-O-S结构组成，预氧化的试样涂层沉积速率是未氧化试样的2～3倍，试样氧化后涂层的抗热冲击性能和结合强度得到了提高。
To alleviate the coking on the inner surface of ethylene cracking tube, SiO2/S composite coating was prepared on HP40 alloy specimen with DMDS and TEOS as precursors by means of atmospheric pressure chemical vapor deposition （APCVD）. The effect of deposition temperature, gas flow rate and deposition time on deposition rate of the coatings was analyzed, and the morphology, composition and chemical structure were characterized by scanning electronic microscopy（SEM）, X-ray photoelectron spectroscopy （XPS） and Raman spectrum, respectively. The binding of the pre-oxidized specimen and SiO2/S composite coating was tested. The results show that the SiO2/S composite coating is composed of threecircle Si-O-Si structure and Si-O-S structure. The deposition rate of the pre-oxidized specimen is 2 - 3 times of that of the unoxidized specimen and the anti-thermal shock property and the binding strength of the SiO2/S composite coating with substrate is increased after the specimen is preoxidized.