文献类型：期刊文献

中文题名：等离子体预处理对316L不锈钢-EVAL界面结合强度的影响

英文题名：Improvement of the Bonding Strength between EVAL and 316L Stainless Steel by RF Plasma Treatment

作者：袁媛[1];尹民[1];尹志岚[1];刘昌胜[1]

机构：[1]教育部生物材料工程研究中心华东理工大学生物材料研究所,上海200237

年份：2006

卷号：25

期号：1

起止页码：95

中文期刊名：中国生物医学工程学报

外文期刊名：Chinese Journal of Biomedical Engineering

收录：CSTPCD;;Scopus;北大核心:【北大核心2004】；CSCD:【CSCD2011_2012】；

语种：中文

中文关键词：RF等离子体;316L不锈钢;EVAL;结合强度

外文关键词：RF plasma; 316L stainless steel; EVAL; bonding strength

摘要：研究了Ar、N2及Ar+N2等离子体预处理对316L不锈钢与其表面EVAL涂层之间结合强度的影响。采用全反射FTIR、AFM测试研究了等离子体预处理前后316L不锈钢表面物化状态的变化;利用X-光电子能谱研究了316L不锈钢与EVAL涂层之间的界面反应。研究结果表明:Ar、N2及Ar+N2等离子体预处理后,316L不锈钢与EVAL涂层之间的结合强度分别高达0.92MPa、1.2MPa、1.5MPa(未经处理的试样为0.15MPa)。全反射FTIR和AFM分析结果表明Ar、N2等离子体均对基体表面有较好的清洗作用,Ar等离子体对基体表面具有较强的轰击、刻蚀作用。XPS测试表明EVAL在经Ar等离子体处理的基体表面仅以物理吸附状态存在,推测与N2等离子体处理的基体之间形成了metal-N-O形式的氢键结合。
In order to enhance the adhesion of EVAL on 316L stainless steel, the substrate was pretreated by low frequency RE plasma. The influence of different gas plasma （At plasma, N2 plasma, two steps including Ar and N2 plasma） on the bonding strength was investigated. The results indicated that the plasma pretreatment could significantly improve the adhesion of EVAL on substrate and the bonding strength of EVAL on the substrate pretreated by Ar plasma, N2 plasma, and two steps plasma reached 0.92MPa, 1.2MPa, 1.5MPa, respectively （Control was 0.15MPa）. ATR-FTIR revealed that the carbon hydrogen contaminations were entirely removed from the surface of the substrates after treated by Ar plasma and N2 plasma. AFM analysis showed that more roughness existed on the surface of sample treated by argon plasma than treated by N2 plasma. XPS analysis showed that EVAL physically absorbed on the surface of substrate treated by argon plasma, but after treated by nitrogen plasma, some hydroxyl groups of EVAL reacted with Fe-N to form Fe-N-O bond. It could be confirmed that the adhesive improvement of EVAL on 316L stainless steel treated by Ar plasma relatedto cleaning and etching effects. The enhancement of bonding strength by N2 plasma pretreatment was resulted from the cleaning and reaction effects, and the two steps process, cleaning effect, etching effect, reaction effect were combined to lead to the highest bonding strength.