文献类型：期刊文献

中文题名：光致振动响应在减反微结构作用下的研究

英文题名：Study on photo-induced vibrational response under the action of reduced-reflection microstructure

作者：江悠阳[1];廖兴雨[1];杨定坤[1];李锦[1]

机构：[1]华东理工大学机械与动力工程学院,上海200237

年份：2025

卷号：44

期号：12

起止页码：64

中文期刊名：传感器与微系统

外文期刊名：Transducer and Microsystem Technologies

收录：;北大核心:【北大核心2023】；

基金：国家自然科学基金资助项目(52075172)。

语种：中文

中文关键词：光致振动;激光驱动;减反微结构;能量转换

外文关键词：photo-induced vibration;laser actuation;reduced-reflection microstructure;energy conversion

摘要：激光驱动具有非接触、可调可控等优势,应用前景广泛。建立了激光激励的热弹耦合模型,提出了一种针对光热非线性振动提高能量效率的方法,设计了一种高频脉冲周期序列用于激光激励,实现了光致振动在非线性模态交互作用下的大幅激发,将悬臂梁体积功率比增加几千倍,振幅扩大至毫米级。研究了不同激光加工间距下的减反微结构的形貌及反射率,并探究该结构对响应振幅的影响。实验证明:利用减反微结构降低材料反射率,可提高光热转换效率,进而增强非线性低频响应,有效提高金属光致振动梁在厚度方向上的振幅(7至30倍)。拓宽了光致振动在半导体、医药和精密加工领域上的应用范围。
Laser driving has the advantages of non-contact,adjustability and controllability,and has a wide range of application prospects.A thermoelastic coupling model for laser excitation is constructed.A method to improve energy efficiency for photothermal nonlinear vibrations is proposed,and a high-frequency pulse cycle sequence is designed for laser excitation.This achieves a large excitation of photoinduced vibrations in the presence of nonlinear mode interactions,increasing the cantilever beam volume-to-power ratio by a factor of several thousand and expanding the amplitude to the millimeter scale.The morphology and reflectivity of the reduced-reflection microstructure are studied under different laser processing spacings,and the effect of the structure on the response amplitude is investigated.It is demonstrated that the utilization of the reduced-reflection microstructures to reduce the material reflectivity can improve the photothermal conversion efficiency,so as to enhance the nonlinear low-frequency response and effectively increase the amplitude of the metal photo-induced vibrational beam in thickness direction(by a factor of 7 to 30).The application scope of photo-induced vibration in the fields of semiconductors,pharmaceuticals,and precision machining is broadened.