文献类型：会议论文

英文题名：An integrated three-dimensional micro-solenoid giant magnetoimpedance sensing system based on MEMS technology

作者：Feng, Zhu[1];Zhi, Shaotao[1];Wei, Mingchen[1];Zhou, Yong[1];Liu, Cui[2];Lei, Chong[1]

机构：[1]Shanghai Jiao Tong Univ, Sch Elect Informat & Elect Engn, Key Lab Thin Film & Microfabricat, Minist Educ,Dept Micronano Elect, Dongchuan Rd 800, Shanghai 200240, Peoples R China;[2]East China Univ Sci & Technol, Sch Mat Sci & Engn, Meilong Rd 130, Shanghai 200237, Peoples R China

会议论文集：International Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA)

会议日期：SEP 11-14, 2018

会议地点：Kobe Chamber Commerce, Kobe, JAPAN

主办单位：Kobe Chamber Commerce

语种：英文

外文关键词：Giant magnetoimpedance; Magnetic sensor; Micro-electromechanical Systems (MEMS) technology; Integrated system

摘要：In this paper, we proposed an integrated three-dimensional (3D) micro-solenoid giant magnetoimpedance (GMI) sensing system. The sensing system is composed by a 3D micro-solenoid inside which patterned Cobalt-based ribbon is kept as magnetic core and this system was fabricated by Micro-electromechanical Systems (MEMS) technology. The system was measured by non-contact method, which has the advantages of high sensitivity, low power consumption and widespread application prospect. The influence of external magnetic field direction and excitation frequency on micro-solenoid GMI sensing system has been discussed respectively. The fabricated system exhibits an optimum magnetoimpedance (MI) ratio of 4360 +/- 40 % at the excitation frequency of 13 MHz under longitudinal external magnetic field. In consequence, 3D micro-solenoid GMI sensing system offers great magnetic performance and this integrated sensing system has potential applications in the field of weak magnetic field detection. (C) 2019 Elsevier B.V. All rights reserved.