文献类型：会议论文

英文题名：Low-temperature thermoelectric properties of Zn/Sb thin films prepared by magnetronsputtering

作者：Shu, Min[1]; Wang, Xue-Sheng[1]; Dai, Jing-Jing[1]; Qi, Xue-Gui[1]

机构：[1] School of Mechanical and Power Engineering, East China University of Science and Technology, Shanghai, China

会议论文集：ICMREE2011 - Proceedings 2011 International Conference on Materials for Renewable Energy and Environment

语种：英文

外文关键词：Modulation - Electric power factor - Film preparation - Magnetron sputtering - Temperature - Seebeck coefficient - Electric conductivity measurement - Electric conductivity - Composite films

摘要：The Zn/Sb multi-layer thin films were prepared by magnetron sputtering method, which was sputtered on (100) Si five times by two single targets. The variations of the Seebeck coefficient, the electric conductivity and the power factor of three Zn/Sb composite films, which was of modulation ratio of 11, 32 and 41 respectively in a fixed modulation period of 40nm, were studied in the temperature range from 160K to 250K. Analyzing the structure and surface appearance by XRD and AFM, the film surface was smooth, dense, and without any macroparticles. The grains of the films grow under the preferred orientations. The experiment results show an obvious trend that the power factor decreases with increasing temperature. The power factor is at the highest value of 7543.54W/mK2 in 174K, as the modulation ratio is 41. ? 2011 IEEE.