文献类型：期刊文献

中文题名：ZnO/SnO_2,SnO_2/ZnO UPF复合膜的制备及气敏特性研究

英文题名：PREPARATION AND GAS-SENSING PROPERTIES OF ZnO/SnO_2, SnO_2/ZnO BILAYER THIN FILMS

作者：王声乐[1];黄家桢[2];沈明赓[2];戴慕仉[2];文全胜[1];陆元成[1];潘孝仁[1];庞世瑾[3]

机构：[1]华东理工大学物理系,上海200237;[2]华东理工大学分析测试中心;[3]中国科学院北京真空物理实验室,北京100086

年份：1995

卷号：15

期号：4

起止页码：215

中文期刊名：真空科学与技术

外文期刊名：Vacuum Science and Technology

收录：Scopus;CSCD:【CSCD_E2011_2012】；

语种：中文

中文关键词：双层薄膜;赶微粒子膜;选择性;灵敏度

外文关键词：Bilayer thin film, Ultrafine particles film(UPF),Selectivity, Sensitivity

摘要：用直流气体放电活化反应蒸发沉积技术在普通玻璃基片上制备了ZnO／SnO2及SnO2／ZnO超微粒子（UPF）双层复合薄膜。样品经扫描电子显微镜（SEM）和X射线衍射仪分析，结论为超微粒子的复合薄膜。同时提出了最佳制备工艺。气敏测试结果表明：ZnO／SnO2及SnO2／ZnOUPF复合膜较单层ZnO及SnO2UPF表现出优良的选择性，其灵敏度和最佳工作温度也得到相应的改善。
In this paper, a dc gas discharge activating reaction evaporation technique was used to prepare ZnO/SnO2 and SnO2/ZnO UPF bilayer thin films. These bilayer thin films of ultrafine particles were grown successfully onto ordinary glass substrates. The films have been characterized by means of XRD and SEM,and shown to be the UPF. Their properties of gas-sensing were investigated. We have obtained the best technical conditions. The result of gas-sensing experiment shows that ZnO/SnO, and SnO2/ZnO UPF bilayer thin films have a good selectivity for detecting C2H5OH in the presence of gasoline gas and (CH3)2 CO gas, an increase of sensitivity, and a decrease of operating temperature. The bilayer UPF thin films prepared by this procedure may serve as high-quality gas sensors.