文献类型：期刊文献

英文题名：All Laser Micro-Fabrication of Stretchable Sensors

作者：Li, Zhenglin[1];Wang, Ziyang[1,2];Li, Qi[1];Wang, Yiming[1];Xiao, Biao;Gao, Yang[1];Zhu, Mingliang[1];Xuan, Fuzhen[1]

机构：[1]East China Univ Sci & Technol, Sch Mech & Power Engn, Key Lab Pressure Syst & Safety, Shanghai 200237, Peoples R China;[2]Shanghai Inst Special Equipment Inspection & Tech, Shanghai 200062, Peoples R China

年份：2025

卷号：25

期号：17

起止页码：33429

外文期刊名：IEEE SENSORS JOURNAL

收录：;EI(收录号：20241916048533);WOS:【SCI-EXPANDED(收录号:WOS:001562587700011)】；

基金：This work was supported in part by the National Natural Science Foundation of China under Grant 52275146, Grant 61804054, and Grant 12174102; in part by Shanghai Natural Science Foundation under Grant 20ZR1451000; in part by the Open Project Program of Wuhan National Laboratory for Optoelectronics under Grant 2020WNLOKF007; in part by Shanghai Special Program for Fundamental Research under Grant 22TQ1400100-9; and in part by the Scientific Research Projects of Shanghai Municipal Administration for Market Supervision under Grant 2022-33.

语种：英文

外文关键词：Graphene; laser microfabrication (LMF); serpentine structure; stretchable sensor

摘要：With the development of the Internet of Things (IoT), stretchable sensors with high sensitivity and good conformality have attracted tremendous interest. In recent years, the laser microfabrication (LMF) method has shown the potential application in fabricating various stretchable sensors. Nevertheless, how to modulate the properties of the sensing element (SE) and conductive interconnect structure (CIS) in the LMF process to meet the application requirements for stretchable sensors is still a challenge for LMF. This study proposed an all-LMF technology to fabricate stretchable sensors. Laser-induced reduction (LIR) and laser-induced ablation (LIA) are used to prepare serpentine Cu-CIS with a high conductivity of 123 mu Omega center dot cm, minimized response to deformation (sensitivity <1x10(-3) ), and a high stability at strain up to 150%. Laser-induced pyrolysis and LIA is used to synthesize graphene-SE with bioinspired microcracks, demonstrating a similar to 210 times increment in sensitivity than the one without microcracks. The conjunction of the CIS and the SE is formed by Cu nanoparticle and graphene composites, exhibiting insensitivity (sensitivity <0.42) to mechanical deformations. Representative applications fully demonstrate that LMF devices can be customized to the size and structure required, with stability and economy.