文献类型：期刊文献

英文题名：Systematic direct solid modeling approach for surface micromachined MEMS

作者：Li, Jianhua[1]; Liu, Yusheng[2]; Ling, Hao[1]; Guo, Weibin[1]; He, Gaoqi[1]

机构：[1] Dept of Computer Sci. and Eng., East China University of Science and Technology, Shanghai, 200237, China; [2] State Key Lab of CAD and CG, Zhejiang University, Hangzhou Zhejiang, China

年份：2012

卷号：433-440

起止页码：3130

外文期刊名：Advanced Materials Research

收录：EI(收录号：20120414712637)

语种：英文

外文关键词：MEMS - Surface micromachining

摘要：Current MEMS design methods do not fulfill the needs of emerging complex MEMS devices. In this paper, a systematic direct solid modeling approach for surface micromachined MEMS design is proposed. In this approach, practical model of a surface micromachined MEMS device, designed in a traditional CAD environment, is simplified firstly; after simplification, masks and process sequences are generated through solid-based mask synthesis; then local variation is used to refining the 3D layer model; finally masks and process sequences are verified in rough simulation and accurate simulation. The approach aims at enabling designers to focus on creative design activity in an intuitive mode. ? (2012) Trans Tech Publications, Switzerland.