文献类型：期刊文献

中文题名：基于SLM投影拼接技术的液晶光学元件制备

英文题名：Fabrication of liquid crystal optical elements based on SLM projection splicing technology

作者：余丽红[1];沈冬[1];郑致刚[1,2]

机构：[1]华东理工大学物理学院,上海200237;[2]华东理工大学材料科学与工程学院,上海200237

年份：2022

卷号：37

期号：9

起止页码：1132

中文期刊名：液晶与显示

外文期刊名：Chinese Journal of Liquid Crystals and Displays

收录：CSTPCD;;Scopus;WOS:【ESCI(收录号:WOS:000889470900002)】；北大核心:【北大核心2020】；CSCD:【CSCD_E2021_2022】；

基金：Supported by National Natural Science Foundation of China(No. 61822504,No. 51873060,No. 62035008); Innovation Program of Shanghai Municipal Education Commission(No. 2021-01-07-00-02-E00107);"Shuguang Program"of Shanghai Education Development Foundation and Shanghai Municipal Education Commission (No. 21SG29)

语种：中文

中文关键词：液晶光学元件;空间光调制器;光取向;几何相位;拼接

外文关键词：liquid crystal optical elements;spatial light modulator;photo-alignment;geometric phase;splicing

摘要：提出了一种以硅基液晶空间光调制器(LCOS SLM,以下简称SLM)为基础的投影拼接式光取向技术。通过结合SLM和二维移动平台可以实现任意尺寸、任意几何相位图案化分布的液晶光学元件的制备。基于此技术,通过连续扫描曝光的方法制备了多种液晶光学元件:一维偏振光栅、二维光栅、微透镜阵列和全息图。实验结果表明:通过该技术可以实现连续相位分布的光学元件的制备和扩大光学元件的口径;尺寸为25.4 mm×25.4 mm的一维偏振光栅的衍射效率达到98.32%,且各区域误差不超过1%;可以仅改变加载到SLM上的曝光图样,实现二维周期性或其他复杂图案的液晶光学元件的制备。基于SLM的投影拼接式光取向技术具有高分辨率、高效率、工艺简单、可实现任意尺寸光学元件制备等特点,可以进一步推动液晶光学元件的发展和实际应用。
This paper proposed a projection splicing photo-alignment technology based on a liquid crystal on silicon spatial light modulator(LCOS SLM).By combining SLM and two-dimensional translation stage,the fabrication of liquid crystal optical elements with arbitrary size and arbitrary Pancharatnam-Berry phase pattern can be realized.Based on this technology,a variety of liquid crystal optical elements were fabricated by continuous scanning exposure method,such as one-dimensional polarization grating,two-dimensional grating,microlens array and hologram.The experimental results show that:this technology can realize the fabrication of optical elements with continuous phase distribution and enlarge the aperture of optical elements;the diffraction efficiency of a one-dimensional polarization grating with a size of 25.4 mm×25.4 mm reaches 98.32%,and the error in each area does not exceed 1%;the liquid crystal optical elements with twodimensional periodicity or other complex pattern can be fabricated only by changing the exposure pattern loaded to the SLM.The SLM-based projection splicing photo-alignment technology has the characteristic of high resolution,high efficiency,simple process,and can realize the fabrication of optical elements of any scale,which can further promote the development and practical application of liquid crystal optical elements.