详细信息
Selective metallization on insulator surfaces with femtosecond laser pulses ( SCI-EXPANDED收录 EI收录)
文献类型:期刊文献
英文题名:Selective metallization on insulator surfaces with femtosecond laser pulses
作者:Xu, Jian[1,2]; Liao, Yang[1,2]; Zeng, Huidan[3]; Zhou, Zenghui[1]; Sun, Haiyi[1]; Song, Juan[1,2]; Wang, Xinshun[1,2]; Cheng, Ya[1]; Xu, Zhizhan[1]; Sugioka, Koji[4]; Midorikawa, Katsumi[4]
机构:[1]Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China;[2]Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China;[3]E China Univ Sci & Technol, Sch Mat Sci & Engn, Key Lab Ultrafine Mat, Minist Educ, Shanghai 200237, Peoples R China;[4]RIKEN, Wako, Saitama 3510198, Japan
年份:2007
卷号:15
期号:20
起止页码:12743
外文期刊名:OPTICS EXPRESS
收录:;EI(收录号:20074110864579);WOS:【SCI-EXPANDED(收录号:WOS:000250006700019)】;
语种:英文
外文关键词:Crystals - Electroless plating - Lithium compounds - Metallizing - Silver compounds - Thin films
摘要:We report selective metallization on surfaces of insulators ( glass slides and lithium niobate crystal) based on femtosecond laser modification combined with electroless plating. The process is mainly composed of four steps: (1) formation of silver nitrate thin films on the surfaces of glass or crystal substrates; (2) generation of silver particles in the irradiated area by femtosecond laser direct writing; (3) removal of unirradiated silver nitrate films; and (4) selective electroless plating in the modified area. We discuss the mechanism of selective metallization on the insulators. Moreover, we investigate the electrical and adhesive properties of the copper microstructures patterned on the insulator surfaces, showing great potential of integrating electrical functions into lab-on-a-chip devices. (C) 2007 Optical Society of America.
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