文献类型：期刊文献

中文题名：常压化学气相沉积SiO_2涂层的制备及其性能研究

英文题名：Atmospheric Pressure Chemical Vapor Deposition of Silica Coating on HP40 Steel and its Property

作者：马良[1];黄志荣[1];罗小秋[1];钱瑜明[1]

机构：[1]华东理工大学机械与动力工程学院,上海200237

年份：2010

卷号：22

期号：2

起止页码：113

中文期刊名：腐蚀科学与防护技术

外文期刊名：Corrosion Science and Protection Technology

收录：CSTPCD;;Scopus;北大核心:【北大核心2008】；CSCD:【CSCD2011_2012】；

语种：中文

中文关键词：常压化学气相沉积法(APCVD);SiO2涂层;HP40钢;粘结强度

外文关键词：Atmospheric pressure chemical vapor deposition（APCVD）; silicon dioxide coatings; steel HP40; bond strength

摘要：以正硅酸乙酯(TEOS)为源物质,空气为载气和稀释气,采用常压化学气相沉积法(APCVD)在HP40钢表面制备了SiO2涂层.采用光学显微镜、扫描电子显微镜、能量色散能谱仪、D\MAX-C型X射线衍射仪、显微硬度仪等,研究了SiO2涂层的组织结构、表面形貌、物相组成和显微硬度;并用热震实验法和剥离实验法研究了涂层与HP40基体的结合强度.结果表明,所制备的SiO2涂层厚度约为1μm,由细小颗粒组成,颗粒比较均匀、大部分颗粒的粒径均在1μm以下;涂层无明显孔隙,与基体的结合强度较高;其显微硬度明显高于HP40基体.
The silica coatings were prepared on steel HP40（25Cr35Ni）by means of atmospheric pressure chemical vapor deposition（APCVD）in air flow with TEOS vapor.The microstructure,surface morphology,phase constituent and microhardness of silica coatings were characterized by using optical microscopy（OM）,scanning electron microscopy（SEM）,energy dispersion X-ray analysis（EDS）,X-ray diffraction（XRD）and microhardness tester（HXD-1000TM）.The adhesive strength to the steel substrate of silica coating was examined by thermal shock test and surface stripping test.The result showed that the silica coating was smooth,uniform,dense and had better bond strength with substrate.In addition,the thickness of the coating is about 1 μm with a microhardness higher than steel HP40.