文献类型：期刊文献

英文题名：Customizable and highly sensitive 3D micro-springs produced by two-photon polymerizations with improved post-treatment processes

作者：Shang, Xinggang[1,2,3];Wang, Ning[2,3];Wang, Zimeng[4];Jiang, Hanqing[2,3];Jia, Yunfei[4];Zhou, Nanjia[2,3];Qiu, Min[2,3]

机构：[1]Zhejiang Univ, Coll Opt Sci & Engn, Hangzhou, Peoples R China;[2]Westlake Univ, Sch Engn, Key Lab 3D Micro Nano Fabricat & Characterizat Zh, 18 Shilongshan Rd, Hangzhou, Zhejiang, Peoples R China;[3]Westlake Inst Adv Study, Inst Adv Technol, 18 Shilongshan Rd, Hangzhou, Zhejiang, Peoples R China;[4]East China Univ Sci & Technol, Sch Mech & Power Engn, Key Lab Pressure Syst & Safety, Minist Educ, Shanghai, Peoples R China

年份：2022

卷号：120

期号：17

外文期刊名：APPLIED PHYSICS LETTERS

收录：;EI(收录号：20221912098537);WOS:【SCI-EXPANDED(收录号:WOS:000793154400009)】；

基金：The work was supported by the National Natural Science Foundation of China (Nos. 62005224, 61927820, 51905446, and 51975211), the National Key Research and Development Program of China (No. 2017YFA0205700), and Shanghai Rising-Star Program (No. 20QA1402500). The authors thank Westlake Center for Micro/Nano Fabrication for the facility support and technical assistance. N.W. and X.G.S. thank Mrs. Yingying Huang and Mrs. Pin Wang for communications of experimental characterizations. The authors also appreciate useful discussions with Dr. Xiaorui Zheng and Dr. Yang Gao.

语种：英文

外文关键词：Photons - Polymerization - Springs (components)

摘要：Springs are ubiquitous in a variety of scientific and engineering fields. However, the comprehensive study on mechanical properties of micro-spring has not been fully conducted yet due to a lack of reliable productions of varied-shaped micro-springs. Here, we report the design and manufacturing of triple-helix-shaped springs employing two-photon polymerization (TPP) technologies and present a systemic study on the mechanical properties of micro-springs particularly involving spring constants of k. To construct high-quality hollow microstructures, we optimize the TPP process by combining violet light post-treatment with a proper selection of cleaning liquid. Consequently, we demonstrate that the sensitives k can be actively tuned over a range of two orders of magnitude, from similar to 1.5 to similar to 108.2 mu N/mu m while maintaining a high resolution of similar to 1 mu N/mu m. Furthermore, compression tests showcase an excellent agreement among all force-vs-displacement lineshapes, resulting in a small k fluctuation of < 1%. On the whole, we expected that the modified TPP technique along with proposed helical springs opens an alternative avenue toward micro-scale force detection, leading to potential applications in the field of bio-sensing, where typical forces to be measured exist within a broad range from several piconewtons to several micronewtons. Published under an exclusive license by AIP Publishing.