文献类型：期刊文献

中文题名：多层复合Bi/Sb纳米薄膜的制备及热电性能研究

英文题名：Preparation and Research on Performance of Nano Multi-layer Bi/Sb Composite Thin Films

作者：代晶晶[1];王学生[1];疏敏[1];戚学贵[1]

机构：[1]华东理工大学机械与动力工程学院,上海200237

年份：2012

卷号：26

期号：2

起止页码：98

中文期刊名：材料导报

外文期刊名：Materials Reports

收录：CSTPCD;;Scopus;北大核心:【北大核心2011】；CSCD:【CSCD2011_2012】；

基金：国家自然科学基金(50706012)

语种：中文

中文关键词：磁控溅射;纳米薄膜;Bi/Sb;Seebeck系数;电导率;功率因子

外文关键词：factor magnetron sputtering, nano thin film, Bi/Sb, Seebeck coefficient, electric conductivity, power

摘要：选取单晶硅作为隔热衬底,Bi和Sb材料作为靶材,采用磁控溅射技术溅射制备多层复合纳米薄膜。研究了当固定调制周期为40nm,Bi和Sb的调制比分别为1∶1、3∶2、4∶1和1∶4时,Bi/Sb超晶格复合薄膜的See-beck系数、电导率和功率因子在160～250K温度范围内随温度的变化。发现当调制比为1∶4时,Bi/Sb薄膜的功率因子明显高于其它3种情况。
The nano multi-layer composite material thin film, with single-crystal silicon as thermal insulation substrate and I3i and Sb as sputter targets respectively, was prepared by magnetron sputtering. At the same value of modulation periods（40nm）, four different Bi/Sb modulation ratios： 1 ： 1,3 ： 2,4 ：1,1 ： 4, were used. The Seebeck coefficient, electric conductivity and power factor of the superlattice composite thin films , composed of Bi and Sb, varied with the variation of temperature which ranged from 160K to 250K. It could he found that the power factor was significantly better with the modulation ratio 1 - 4 than with the other modulation ratios.