文献类型：期刊文献

英文题名：Photoluminescence properties of ZnO:Al films deposited on flexible PET substrate by RF reactive magnetron sputtering

作者：Zheng, Zhijia[1];Lu, Hui[1];Bi, Han[1];Lin, Xian[2];Laaksonen, Aatto[3]

机构：[1]E China Univ Sci & Technol, Dept Phys, Shanghai 200237, Peoples R China;[2]Shanghai Univ, Dept Phys, Shanghai 200444, Peoples R China;[3]Stockholm Univ, Dept Mat & Environm Chem, Div Phys Chem, S-10691 Stockholm, Sweden

年份：2013

卷号：7

期号：9-10

起止页码：676

外文期刊名：OPTOELECTRONICS AND ADVANCED MATERIALS-RAPID COMMUNICATIONS

收录：;EI(收录号：20203409075187);WOS:【SCI-EXPANDED(收录号:WOS:000326414600011)】；

语种：英文

外文关键词：ZnO:Al (AZO); Thin films; Flexible PET; RF reactive magnetron sputtering; Photoluminescence

摘要：Aluminium-doped ZnO (AZO) thin films have been deposited on flexible polyethylene terephthalate (PET) substrate by RF reactive magnetron sputtering process at low substrate temperature (room -100 degrees C), and their photoluminescence (PL) behavior at room temperature and the influence of O-2:Ar ratio, substrate temperature, and deposition time were investigated. The strong near band-edge UV emission and the weak blue emission were observed, while the defect-related deep-level green emission was nearly absent, indicating that high optical quality AZO films, grown on flexible PET substrate, were obtained using the RF reactive magnetron sputtering technique. The origin of the emissions is discussed.