文献类型：期刊文献

中文题名：纳米Pt膜的晶粒尺寸及其对热导率的影响

英文题名：GRAIN SIZE AND ITS EFFECT ON THERMAL CONDUCTIVITY OF Pt NANOFILMS

作者：曹炳阳[1];张清光[1];张兴[1];高桥厚史[2];声田龙也[2];乔文明[3];滕井丕夫[4]

机构：[1]清华大学工程力学系热科学与动力工程教育部重点实验室,北京100084;[2]Graduate School of Engineering,Kyushu University;[3]华东理工大学化学工程联合国家重点实验室,上海200237;[4]Institute for Materials Chemistry and Engineering,Kyushu University

年份：2006

卷号：42

期号：11

起止页码：1207

中文期刊名：金属学报

外文期刊名：Acta Metallurgica Sinica

收录：CSTPCD;;EI(收录号：20070110348763);Scopus;WOS:【SCI-EXPANDED(收录号:WOS:000242356500017)】；北大核心:【北大核心2004】；CSCD:【CSCD2011_2012】；

基金：国家自然科学基金资助项目50606018~~

语种：中文

中文关键词：Pt纳米薄膜;热导率;晶粒尺寸;晶界效应;尺寸效应

外文关键词：Pt nanofilm, thermal conductivity, grain size, grain boundary effect, size effect

摘要：采用电子束-物理气相沉积法(EB-PVD)制备了6个厚度为15-62 nm的铂薄膜,研究了纳米薄膜的晶粒尺寸及其对热导率的影响规律．当薄膜厚度小于30 nm时,晶粒平均尺寸接近于薄膜的厚度;晶粒尺寸随着薄膜厚度的增加而增大并趋于定值;当薄膜厚度大于30 nm时,晶粒尺寸约为20 nm．受薄膜的表面和内部晶界的综合影响,铂纳米薄膜的热导率大大低于体材料的值,并且纳米薄膜的热导率随着薄膜厚度的增加而增大并趋于一个低于体材料热导率的值．
Six Pt films with thicknesses of 15-62 nm have been fabricated by electron beamphysical vapor deposition （EB-PVD）. The grain sizes of the Pt nanofilms and its effect on the thermal conductivity have been studied experimentally. It is found that the grain size increases with the nanofilm thickness increasing and goes to a constant about 20 nm. The grain size is nearly comparable with the nanofilm thickness with the thickness less than 30 nm, while becomes much less than the nanofilm thickness with the thickness larger than 30 nm. Influenced by the surface and grain boundary effects, the thermal conductivity of the Pt nanofilms is greatly lower than that of the Pt bulk. It is noted that the thermal conductivity of the studied platinum nanofilms increases with the thickness increasing and runs to 35 W/mK, which is much lower than that of the bulk material.