文献类型：期刊文献

中文题名：基于Matlab的划片机自动对准系统的研究

英文题名：Research on automatic alignment system of dicing machine based on matlab

作者：杨伟伟[1];肖民[1]

机构：[1]华东理工大学机械与动力工程学院,上海200237

年份：2012

期号：5

起止页码：96

中文期刊名：机械设计与制造

外文期刊名：Machinery Design & Manufacture

收录：CSTPCD;;北大核心:【北大核心2011】；

语种：中文

中文关键词：划片机;自动对准;图像处理;模板匹配

外文关键词：Dicing saw; Automatic alignment; Image process; Pattern matching

摘要：分析了划片机自动对准系统的构成和工作原理,提出模板匹配的简化算法,从边缘检测处理后的图像中提取晶圆切道,通过直线拟合得到晶圆切道中心线,完成晶圆的定位。Matlab的仿真与实验结果表明,该自动对准方案能有效地识别晶圆中的切道,确定切道的位置偏差,满足晶圆自动对准的技术要求。
The working principle of a full automatic dicing saw alignment system is investigated in it.The simplified calculation method is presented by using matched template.The wafer channel obtained from the processed image data with the edge detection achieves the channel center line through using curve fitting,and then the location of the wafer alignment is pinpointed.This experiment and Matlab simulation show that this automatic recognition program can efficiently recognize the wafer channel and satisfy the technical requirements.