文献类型：期刊文献

英文题名：Rational Design and Fabrication of MEMS Gas Sensors With Long-Term Stability: A Comprehensive Review

作者：Zhang, Chao[1];Wang, Tianyi[1];Zhang, Guozhu[1];Gao, Rui[1];Gao, Chengze[1];Wang, Zeyu[1];Xuan, Fuzhen[1]

机构：[1]East China Univ Sci & Technol, Sch Mech & Power Engn, Shanghai Key Lab Intelligent Sensing & Detect Tech, Shanghai 200237, Peoples R China

年份：2025

卷号：12

期号：39

外文期刊名：ADVANCED SCIENCE

收录：;EI(收录号：20253719153571);WOS:【SCI-EXPANDED(收录号:WOS:001570150600001)】；

基金：This work was supported by the National Natural Science Foundation of China (Grant Number: 52375148), the Innovative Research Group Project of the National Natural Science Foundation of China (Grant No.52321002), National Major Scientific Instruments and Equipments Development Project of National Natural Science Foundation of China (Grant number: 32327801) and the Natural Science Foundation of Shanghai (Grant No. 23ZR1417000).r No Statement Availabler No Statement Availabler No Statement Available

语种：英文

外文关键词：device structure optimization; long-term stability; machine olfactory; MEMS gas sensor; sensing film degradation

摘要：With the growing demand for chemical information collection from the environment, miniaturized size and high sensitivity labeled microelectromechanical systems (MEMS) gas molecular sensing devices have emerged as a promising element in the development of machine olfactory. However, prolonged exposure to gas analytes often induces slow chemical transformations on the sensing film surface, leading to reduced chemical activity, performance degradation, and mechanical failures such as membrane cracking or delamination. In the real market, especially under harsh working environments, long-term stability is a critical quality metric in gas sensor development. Therefore, the pursuit of MEMS gas sensors that offer both high sensitivity and extended lifespan becomes indispensable yet challenging. Thus, this review provides a comprehensive overview of recent studies and achievements in MEMS gas sensors, highlighting efforts aimed at enhancing their working stability. Key areas of focus include advancements in the chemical and physical characteristics of sensing films, as well as improvements in device structures. Furthermore, current limitations, perspectives, and future possibilities for designing and fabricating MEMS gas sensors with long-term stability are discussed.