文献类型：会议论文

英文题名：The study of nanosized zeolite films in sensor for DMMP gas detection

作者：Xie, Haifen[1]; Hu, Qiong[1]; Zhou, Jia[2]; Huang', Yiping[2]

机构：[1] Physics Department, East China University of Science and Technology, 130 Meilong Road, Shanghai, 200237, China; [2] Department of Microelectronics 220 Handan Road, ASIC and System State Key Lab, Shanghai, 200433, China

会议论文集：Proceedings of the 2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2009

会议日期：July 6, 2009 - July 10, 2009

会议地点：Suzhou, China

语种：英文

外文关键词：Films - Gas detectors - Acetone - Pore size - Zeolites

摘要：Nanosized ZSM-5 and Ag+ modified nanosized ZSM-5 as sensitive films to detect the nerve agent simulant dimethylmethylphosphonate(DMMP) at low concentration has been reported [1]. In order to find the relationship between pore size and sensitivity, larger pore size f3 zeolite film was also used to detect the DMMP gas. Different types of zeolite films with specific sensitivity towards low concentration of acetone and ethanol gases were discussed. This observation demonstrates that sensitivity depended not only on the size of the molecules but also morphology of zeolite grains. The Ag+ modified nanosized ZSM-5 film has a high sorption capacity of acetone gas, while nanosized ZSM-5 has higher sorption capacity of DMMP gas. f3 zeolite film had the worst absorption of the DMMP gas. The absorption and desorption condition of nanosized ZSM-5 film was also discussed in this paper. Based on these results it was concluded that nanosized ZSM-5 films could be used as effective DMMP gas sensor materials. ?2009 IEEE.