文献类型：期刊文献

英文题名：An integrated three-dimensional micro-solenoid giant magnetoimpedance sensing system based on MEMS technology

作者：Feng, Zhu[1]; Zhi, Shaotao[1]; Wei, Mingchen[1]; Zhou, Yong[1]; Liu, Cui[2]; Lei, Chong[1]

机构：[1] Key Laboratory of Thin Film and Microfabrication [Ministry of Education], Department of Micro-Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Dongchuan Road 800, Shanghai, 200240, China; [2] School of Materials Science and Engineering, East China University of Science and Technology, Meilong Road 130, Shanghai, 200237, China

年份：2019

卷号：299

外文期刊名：Sensors and Actuators, A: Physical

收录：EI(收录号：20194007492640)

语种：英文

外文关键词：Electric impedance - Solenoids - MEMS

摘要：In this paper, we proposed an integrated three-dimensional (3D) micro-solenoid giant magnetoimpedance (GMI) sensing system. The sensing system is composed by a 3D micro-solenoid inside which patterned Cobalt-based ribbon is kept as magnetic core and this system was fabricated by Micro-electromechanical Systems (MEMS) technology. The system was measured by non-contact method, which has the advantages of high sensitivity, low power consumption and widespread application prospect. The influence of external magnetic field direction and excitation frequency on micro-solenoid GMI sensing system has been discussed respectively. The fabricated system exhibits an optimum magnetoimpedance (MI) ratio of 4360±40 % at the excitation frequency of 13 MHz under longitudinal external magnetic field. In consequence, 3D micro-solenoid GMI sensing system offers great magnetic performance and this integrated sensing system has potential applications in the field of weak magnetic field detection. ? 2019