文献类型：期刊文献

英文题名：Laser Direct Writing of Ultrahigh Sensitive SiC-Based Strain Sensor Arrays on Elastomer toward Electronic Skins

作者：Gao, Yang[1];Li, Qi[1];Wu, Rongyao[1];Sha, Jin[1];Lu, Yongfeng[2];Xuan, Fuzhen[1]

机构：[1]East China Univ Sci & Technol, Sch Mech & Power Engn, Shanghai 200237, Peoples R China;[2]Univ Nebraska, Dept Elect & Comp Engn, Lincoln, NE 68588 USA

年份：2019

卷号：29

期号：2

外文期刊名：ADVANCED FUNCTIONAL MATERIALS

收录：;EI(收录号：20184706117876);WOS:【SCI-EXPANDED(收录号:WOS:000455097900005)】；

基金：This project was supported by the National Key Research and Development Program of China (Grant No. 2018YFB1105400), the National Natural Science Foundation of China (Grant Nos. 51705154 and 61804054), the Shanghai Program for Professor of Special Appointment (Eastern Scholar) at Shanghai Institutions of Higher Learning, Shanghai Rising-Star Program (A type) (Grant No. 18QA1401300), and the Shanghai Sailing Program (Grant No. 17YF1403300).

语种：英文

外文关键词：electronic skin; laser direct writing; strain sensors

摘要：Electronic skins (e-skins) have been widely investigated as important platforms for healthcare monitoring, human/machine interfaces, and soft robots. However, mask-free formation of patterned active materials on elastomer substrates without involving high-cost and complicate processes is still a grand challenge in developing e-skins. Here, SiC-based strain sensor arrays are fabricated on elastomer for e-skins by a laser direct writing (LDW) technique, which is mask-free, highly efficient, and scalable. The direct synthesis of active material on elastomer is ascribed to the LDW-induced conversion of siloxanes to SiC. The SiC-based devices own a highest sensitivity of approximate to 2.47 x 10(5) achieved at a laser power of 0.8 W and a scanning velocity of 1.25 mm s(-1). Moreover, the LDW-developed device provides a minimum strain detection limit of 0.05%, a small temperature drift, and a high mechanical durability for over 10 000 cycles. When it is mounted onto human skins, the SiC-based device is able to monitor external stimuli and human health conditions, with the capability of wireless data transmission. Its potential application in e-skins is further proved by an LDW-fabricated device having 3 x 3 SiC sensor array for tactile sensing.